1997
DOI: 10.1116/1.589253
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Nanoscale colloidal particles: Monolayer organization and patterning

Abstract: The monolayer deposition of nanoscale colloidal particles (Au citrate sols) was demonstrated by employing an aminofunctional silane [3-(2-Aminoethlyamino) propyltrimethoxysilane] as a coupling agent. The compatibility of this colloidal Au deposition method with conventional electron beam lithography techniques was examined, and the two-dimensional patterning of the Au colloidal monolayer was demonstrated. Using this fabrication method, a proposal for a single electron device structure based on nanoscale (2 nm … Show more

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Cited by 147 publications
(67 citation statements)
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“…In most of the studies, the self-assembly scheme has been employed using the chemical interaction between the nanoparticles and the substrate. [9][10][11] This method is effective in achieving a dense layer of nanoparticles. However, the control of the particle density is difficult at submonolayer regime.…”
mentioning
confidence: 99%
“…In most of the studies, the self-assembly scheme has been employed using the chemical interaction between the nanoparticles and the substrate. [9][10][11] This method is effective in achieving a dense layer of nanoparticles. However, the control of the particle density is difficult at submonolayer regime.…”
mentioning
confidence: 99%
“…Natural lithography [34], [35], is an extremely convenient route to developing nanofeatures over large areas for biological investigations. Colloidal gold particles, previously utilized in the development of single-electron devices [36], have emerged as a versatile method of producing nanometric features [37]. Every aspect of nanopatterning can be altered with respect to colloidal fabrication techniques, for example, colloidal and substrate materials, colloidal shape, size, and monolayer distribution which is reflected in feature pitch [33].…”
Section: Introductionmentioning
confidence: 99%
“…This result also demonstrates an example application of EBL to pattern sub-10-nm structures. These nanoparticle structures can be used for single electron devices [17], [18].…”
Section: -Nm Ebl With Cold Developmentmentioning
confidence: 99%