Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-Enhanced AFM Probes

Eichhorn, Volkmar; Bartenwerfer, Malte; Fatikow, Sergej

doi:10.1109/tase.2012.2199753

Cited by 29 publications

(18 citation statements)

References 19 publications

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“…According to Lemma IV. 4, it is possible that v i−1 has been confirmed with three disks as v i−1 is an acute angle. Therefore, ω(v i−1 ) ≤ 3.…”

Section: Bounding the Number Of Probes Usedmentioning

confidence: 99%

“…Metrology is used in many automation applications, such as semiconductor manufacturing and MEMS to inspect the shape of etched silicon structures ( [2], [19]) using scanning probe microscopy (SPM) ( [2], [3], [4]), and virtual metrology (VM) ( [7], [8]), which uses measurements of parameters during the production of wafers to statistically predict production properties. Proximity probes could also be relevant for sonar sensors in 2D and 3D (underwater) applications.…”

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confidence: 99%

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Efficient Proximity Probing Algorithms for Metrology

Adler

Panahi

Stappen

et al. 2015

IEEE Trans. Automat. Sci. Eng.

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Abstract-Metrology, the theoretical and practical study of measurement, has applications in automated manufacturing, inspection, robotics, surveying, and healthcare. The geometric probing problem considers how to optimally use a probe to measure geometric properties. In this paper, we consider a proximity probe which, given a point, returns the distance to the boundary of the nearest object. When there is an unknown convex polygon P in the plane, the goal is to minimize the number of probe measurement needed to exactly determine the shape and location of P . We present an algorithm with upper bound of 3.5n + k + 2 probes, where n is the number of vertices and k ≤ 3 is the number of acute angles of P . The algorithm requires constant time per probe, and hence O(n) time to determine P . We also address the related problem where the unknown polygon is a member of a known finite set Γ and the goal is to efficiently determine which polygon is present. When m is the size of Γ and n is the maximum number of vertices of any member of Γ, we present an O(n m) algorithm with an upper bound of 2n + 2 probes.Note to Practitioners: Abstract-This paper was inspired by the problem of using a sensor with low-dimensional output, such as a range sensor, to determine the shape of an object, which is typically too complex for a single measurement to characterize. Existing approaches to shape measurement generally use sensors with high-dimensional output, such as cameras, or use lowdimensional sensors to measure fixed points, such as with Scanning Probe Microscopy (SPM). It is shown here that by employing an algorithm that uses the results of previous measurements to determine how the next measurement is taken, a non-directional range sensor can be used to efficiently and exactly determine the shape of a convex polygon. This suggests an alternative approach to obtaining information on the shape of an object in cases where low-dimensional sensors are more accurate, faster, or cheaper than their counterparts.

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“…According to Lemma IV. 4, it is possible that v i−1 has been confirmed with three disks as v i−1 is an acute angle. Therefore, ω(v i−1 ) ≤ 3.…”

Section: Bounding the Number Of Probes Usedmentioning

confidence: 99%

mentioning

confidence: 99%

Efficient Proximity Probing Algorithms for Metrology

Adler

Panahi

Stappen

et al. 2015

IEEE Trans. Automat. Sci. Eng.

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“…By contrast, the CNTs provide a single point of contact with the cell, thus allowing this problem to be avoided and visualization of the true topography of the cell surface. More recently, a FIB technique has been reported to provide more accurate control over the CNT attachment procedure, although more work is needed to develop a high-throughput method for producing AFM-based cellular probes [42]. The readers are directed to a review by Wilson and Macpherson, which describes AFM tip attachment methods in greater detail [43].…”

Section: Tip-enhanced Raman Spectroscopymentioning

confidence: 99%

One-Dimensional Nanoprobes for Single-Cell Studies

et al. 2013

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Owing to variation of individual cells within a population, single-cell studies are of great interest to researchers. Recent developments in nanofabrication technology have made this area increasingly attractive as one-dimensional (1D) nanoscale probes can be manufactured with increasing accuracy. Here, we provide an overview and description of the major designs that have been reported to date. For more details of what applications could be realized and how, based on the probe shapes and designs, we summarize the most recently reported performances of 1D single-cell probes with their advantages and limitations. Minimally invasive probes are required for long-term experiments on single cells. Carbon nanotubes with their unique properties and structure are excellent candidates for multitask robotic intracellular probes. Carbon nanotube-tipped cellular endoscopes are less invasive compared with pipettes or cantilever tips. Advances in nanofabrication techniques have made it possible to produce more consistent nanoscale cellular probes that can capture a variety of information from optical, electrical and chemical signals. In addition, these tools can transfer tiny amounts of fluids and molecular materials in a highly localized fashion for the purpose of analyzing or stimulating a variety of responses at the level of individual cells and even cellular organelles. We conclude with a critical analysis of the current state of the field as well as the major obstacles for further probe development of minimally invasive probes and their widespread use in cell biology.

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“…It is thus used for in situ electrical [3] or mechanical [4] characterisation, including mechanical characterisation of biological samples like cells [5]. In such experiments, the SEM can also be coupled with FIB (focused ion beam) [6] or STM (scanning tunneling microscope) [7] techniques. Challenges posed by the use of a typical SEM are largely related to the implementation of the experiment in the vacuum chamber and its operation under an electron beam.…”

Section: A Micro-robotic Manipulationmentioning

confidence: 99%

Robotic in situ stiffness cartography of InP membranes by dynamic force sensing

Abrahamians

Sauvet

Polesel-Maris

et al. 2013

2013 IEEE/RSJ International Conference on Intelligent Robots and Systems

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Typical methods of measuring mechanical properties at the micro-scale are destructive, and do not allow proper characterisation on resonant MEMS/NEMS. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-forkbased dynamic force sensor inside a SEM. Experiments are conducted on InP membranes 200nm thin, using a 9-DoF nanomanipulation system, complemented with virtual reality and automation tools. Results provide stiffness values ranging from 0.6 to 3 N/m on a single sample.

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Nanorobotic Assembly and Focused Ion Beam Processing of Nanotube-Enhanced AFM Probes

Cited by 29 publications

References 19 publications

Efficient Proximity Probing Algorithms for Metrology

Efficient Proximity Probing Algorithms for Metrology

One-Dimensional Nanoprobes for Single-Cell Studies

Robotic in situ stiffness cartography of InP membranes by dynamic force sensing

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