Multiphoton Lithography 2016
DOI: 10.1002/9783527682676.ch13
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Nanoreplication Printing and Nanosurface Processing

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“…These are usually done by photo-or e-beam-lithography, followed by thermal deposition or electroplating. Electroless deposition of coinage metals is also common when depositing onto nonconductive surfaces [5][6][7][8][9][10]. Alternative methods that use a single step to directly pattern the metal offer distinct advantages over mask-based methods.…”
Section: Introductionmentioning
confidence: 99%
“…These are usually done by photo-or e-beam-lithography, followed by thermal deposition or electroplating. Electroless deposition of coinage metals is also common when depositing onto nonconductive surfaces [5][6][7][8][9][10]. Alternative methods that use a single step to directly pattern the metal offer distinct advantages over mask-based methods.…”
Section: Introductionmentioning
confidence: 99%