Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

Zozulia, Aleksandr; Bolk, Jeroen; van Veldhoven, Rene; Nazarikov, Gleb; Pogoretskiy, Vadim; Rihani, Samir; Berry, Graham; Williams, Kevin; Jiao, Yuqing

doi:10.1016/j.mne.2024.100258

Micro and Nano Engineering

2024

DOI: 10.1016/j.mne.2024.100258

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Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

Aleksandr Zozulia,

Jeroen Bolk,

Rene van Veldhoven

et al.

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Nanophotonic integrated active-passive InP membrane devices and circuits fabricated using ArF scanner lithography

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References 24 publications

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