Nanopatterning process based on epitaxial masking for the fabrication of electronic and spintronic devices made of La0.67Sr0.33MnO3/LaAlO3/SrTiO3 heterostructures with in situ interfaces

Abstract

The fabrication of oxide electronics devices is presently hindered by the lack of standardized and well established patterning procedures, applicable down to the nanoscale. In this work, we propose a procedure to obtain patterns with resolution around 100nm on (La,Sr)MnO 3 /LaAlO 3 /SrTiO 3 heterostructures. Our method is based on a multi-step technique, which includes wet and dry etching, epitaxial masking and e-beam lithography. Our procedure is devised to define independent patterns on the interfacial two dimensional electron gas and on the metallic top electrode, while preserving an allin-situ approach for the heterostructure growth. We show results on nanoscale devices based on (La,Sr)MnO 3 /LaAlO 3 /SrTiO 3 , suitable for oxide spintronics applications.

Study of equilibrium carrier transfer in LaAlO3/SrTiO3 from an epitaxial La1−x Sr x MnO3 ferromagnetic layer

“…In-plane and out-of-plane transport measurements were performed in a Physical Properties Measurements System (PPMS) by Quantum Design, with external instruments, in order to extend the measurable currentvoltage range. Current-voltage characteristics were measured on the LSMO/LAO/STO heterostructure, before and after removing the LSMO layer in HCl [28]. In the latter case, an Au electrode was evaporated on the top of the LAO layer.…”

La0.6Sr0.4CoO3−δ Films Under Deoxygenation: Magnetic And Electronic Transitions Are Apart from The Structural Phase Transition

“…[1][2][3][4][5][6][7][8][9][10][11][12] Already small changes of the oxygen vacancy concentration can lead to a dramatic change in the magnetic and electronic properties. [13][14][15] This tunability of physical parameters by controlled change of the ionic composition yields a multitude of ionotronic applications of complex oxides, ranging from memristive devices [16][17][18][19][20][21][22] to field-effect and tunneling devices, [23][24][25] and from solid oxide fuel cells [26,27] and gas separation membranes [28,29] to water splitting catalysts [30][31][32][33] and oxygen sensors. [34,35] In the limit of a high oxygen vacancy concentration, a layered oxygen-vacancyordered BM [36] structure can be realized from the initial PV framework by removing a significant amount of oxygen from the lattice.…”