2005
DOI: 10.1039/b509622g
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Nanopatterning of photonic crystals with a photocurable silica–titania organic–inorganic hybrid material by a UV-based nanoimprint technique

Abstract: UV patternable high refractive index inorganic-organic hybrid materials prepared by sol-gel process can be nanoimprinted in order to get photonic crystal nanopatterns. Non-hydrolytic sol-gel process can make a UV curable and relatively high refractive index hybrid material, which can be cured without a significant shrinkage for nanoimprinting. Sol-gel process of heterogeneously functionalized silicon alkoxides can make the organically modified inorganic Si-O-Ti network very well. The UV-based nanoimprint techn… Show more

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Cited by 62 publications
(37 citation statements)
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References 26 publications
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“…In practical application, this method has been applied to the preparation of optical waveguides and interferometers using microfeatures from organic polymers. [18][19][20] Moreover, the mTM method may also be applicable to the fluorescence image patterning of polymeric materials, with the added benefit of the formation of 3-D structures such as multilayered multichannels. Non-conjugated polymers, which involve aliphatic polyesters, intrinsically exhibit neither visible absorption nor fluorescence because of the forbidden transition due to the carbonyl group.…”
Section: Communicationmentioning
confidence: 99%
“…In practical application, this method has been applied to the preparation of optical waveguides and interferometers using microfeatures from organic polymers. [18][19][20] Moreover, the mTM method may also be applicable to the fluorescence image patterning of polymeric materials, with the added benefit of the formation of 3-D structures such as multilayered multichannels. Non-conjugated polymers, which involve aliphatic polyesters, intrinsically exhibit neither visible absorption nor fluorescence because of the forbidden transition due to the carbonyl group.…”
Section: Communicationmentioning
confidence: 99%
“…This approach has been used to successfully pattern a wide variety of simple and complex metal oxides [86]. A similar approach has been extended to novel materials including a reasonably high index (n = 1.623 at 633 nm) photocurable methacryl silica-titania resin [87], a luminescent titania sol-gel doped with europium chelates for light extraction, and polyacrylamide hydrogels [88].…”
Section: Soft Lithographymentioning
confidence: 99%
“…It is a technique in which microfluidic devices can be made with high precision, low cost, and high productivity. 1 This technique is utilized to fabricate micro-optical elements, 2 photonic crystals, 3,4 nano-scale friction, 5 flat display circuits, storage media, 6 and nano/micro fluidic channels. 7 The machining method to form the nanoscale structure by Mask-Less laser patterning is proposed by alknanethiolate self-assembled monolayers.…”
Section: Introductionmentioning
confidence: 99%