Nanopatterning of GeTe phase change films via heated-probe lithography

Podpirka, Adrian; Lee, Woo‐Kyung; Ziegler, Jed I.; Brintlinger, Todd; Felts, Jonathan R.; Simpkins, Blake S.; Bassim, Nabil; Laracuente, A. R.; Sheehan, Paul E.; Ruppalt, Laura B.

doi:10.1039/c7nr01482a

Cited by 24 publications

(26 citation statements)

References 58 publications

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“…6f. As expected, electrical characterization of the patterned nanostructures showed that the crystallized nanostructures became electrically conducting, in contrast to the non-conducting amorphous GeTe 98 .…”

Section: Local Crystallizationsupporting

confidence: 76%

“…c Amorphization by short heating and fast subsequent quenching to obtain a less ordered phase 96,97 . d Local crystallization of an amorphous material 21,[98][99][100][101][102] . e Heat-assisted local alignment of magnetic dipoles [104][105][106][107] Organic semiconductors…”

Section: Chemical Conversion Deprotection Of Functional Groupsmentioning

confidence: 99%

mentioning

confidence: 99%

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Thermal scanning probe lithography—a review

et al. 2020

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Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with many unique properties which enable original or improved nano-patterning in application fields ranging from quantum technologies to material science. In particular, ultrafast and highly localized thermal processing of surfaces can be achieved through the sharp heated tip in t-SPL to generate high-resolution patterns. We investigate t-SPL as a means of generating three types of material interaction: removal, conversion, and addition. Each of these categories is illustrated with process parameters and application examples, as well as their respective opportunities and challenges. Our intention is to provide a knowledge base of t-SPL capabilities and current limitations and to guide nanoengineers to the best-fitting approach of t-SPL for their challenges in nanofabrication or material science. Many potential applications of nanoscale modifications with thermal probes still wait to be explored, in particular when one can utilize the inherently ultrahigh heating and cooling rates.

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Section: Local Crystallizationsupporting

confidence: 76%

Section: Chemical Conversion Deprotection Of Functional Groupsmentioning

confidence: 99%

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Thermal scanning probe lithography—a review

et al. 2020

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“…While the technology was initially developed for data storage, t-SPL has become an emerging lithography method for nanopatterning of temperature-sensitive and functional materials, such as polymers, 2,3 graphene oxide, 4 molecular glasses, 5 metal alloys, 6 and semiconductors. 7−9 Closed-loop lithography, a key feature of t-SPL, enables thermal patterning of a substrate material with the tip being heated and in situ recording of the surface topography with the tip being at room temperature. This enables rapid prototyping of three-dimensional (3D) patterns into temperature-sensitive resists, 2,3 which can subsequently be transferred into silicon or used for lift-off.…”

Section: Introductionmentioning

confidence: 99%

“…7,8 t-SPL is not limited to organic materials and has been applied on GeTe phase change materials to create crystalline, electrically conductive, and optically absorptive nanoscale patterns from an amorphous, transparent, and electrically insulating substrate. 9 In comparison to laser-assisted nanoimprint lithography 13 or ultrafast thermal nanoimprint lithography, 14 t-SPL is a digital patterning technique which does not require a mask.…”

Section: Introductionmentioning

confidence: 99%

Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography

Zimmermann

Balkenende

Lavrenova

et al. 2017

ACS Appl. Mater. Interfaces

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The miniaturization of nanometer-sized multicolor fluorescent features is of continuous significance for counterfeit security features, data storage, and sensors. Recent advances in engineering of stimuli-responsive supramolecular polymeric materials that respond upon exposure to heat or mechanical force by changing their fluorescence characteristics open new opportunities as functional lithographic resists. Here, we demonstrate the patterning of a thermochromic supramolecular material by thermal scanning probe lithography (t-SPL), an emerging nanofabrication technique, which allows for ultrafast indentation with a heated probe, resulting in both fluorescent and topographic nanofeatures. t-SPL indentation reveals a linear relationship between the temperature at which material softening occurs and the indentation force in the range from 200 to 500 nN. The softening temperature decreases as the heating time increases from 4 μs to 1 ms, following time–temperature superposition behavior. Our results herein confirm that the fluorescence contrast, perceivable as a shift from red to green, was obtained by kinetic trapping of the dissociated state due to ultrarapid cooling when the probe is removed. We use t-SPL to create highly customized fluorescence patterns up to 40 × 40 μm2 in size with a spatial resolution of 86 nm and change the pitch size to modify the fluorescence intensity when observed by fluorescence microscopy. As an application, multifaceted security features with nanometer resolution are explored.

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Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing

Levati

Girardi

Pellizzi

et al. 2023

Adv Materials Technologies

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Nanomaterials derive their electronic, magnetic, and optical properties from their specific nanostructure. In most cases, nanostructured materials and their properties are defined during the materials growth, and nanofabrication techniques, such as lithography, are employed subsequently for device fabrication. Herein, a perspective is presented on a different approach for creating nanomaterials and devices where, after growth, advanced nanofabrication techniques are used to directly nanostructure condensed matter systems, by inducing highly controlled, localized, and stable changes in the electronic, magnetic, or optical properties. Then, advantages, limitations, applications in materials science and technology are highlighted, and future perspectives are discussed.

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Nanopatterning of GeTe phase change films via heated-probe lithography

Cited by 24 publications

References 58 publications

Thermal scanning probe lithography—a review

Thermal scanning probe lithography—a review

Nanopatterning of a Stimuli-Responsive Fluorescent Supramolecular Polymer by Thermal Scanning Probe Lithography

Phase Nanoengineering via Thermal Scanning Probe Lithography and Direct Laser Writing

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