2004
DOI: 10.1016/j.mee.2003.11.007
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Nanoparticle pattern deposition from gas phase onto charged flat surface

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Cited by 26 publications
(23 citation statements)
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“…Meanwhile, there has been a growing focus on the direct position or deposition pattern of particles in the manufacturing of photonic or quantum electronic devices. In industrial processes, particle charging is essential in enabling us to move and deposit particles on desired spots (Krinke et al 2001;Jacobs et al 2002;Kang et al 2004;Kim et al 2006).…”
Section: Introductionmentioning
confidence: 99%
“…Meanwhile, there has been a growing focus on the direct position or deposition pattern of particles in the manufacturing of photonic or quantum electronic devices. In industrial processes, particle charging is essential in enabling us to move and deposit particles on desired spots (Krinke et al 2001;Jacobs et al 2002;Kang et al 2004;Kim et al 2006).…”
Section: Introductionmentioning
confidence: 99%
“…Nanoxerography is a parallel method to fabricate nanoparticle arrys by utilizing a conductive flexible stamp with patterns that can transfer charge patterns on non-conducting surface in a single step [38][39][40] . Fig.…”
Section: Nanoxerographymentioning
confidence: 99%
“…During the process of coating the PDMS stamp with metal through thermal evaporation, buckling of the metal coating can appear due to thermal expansion and contraction of the PDMS stamp 41) . To prevent the buckling, a sputtering method 38) has been suggested. In addition, uniform contact between a stamp and a substrate in large area and fabrication of reliable stamps with nanoscale resolution are issues.…”
Section: Nanoxerographymentioning
confidence: 99%
“…For example, aerosol droplets containing small particles was selectively deposited on prepatterned electrodes [13,14], where the patterning resolution can be enhanced by introducing ions and utilizing the "electrostatic lens" [15]. In these electrostatic patterning studies, surface distribution of the electric charges is often controlled using conductive electrodes, chemically modifying the surface [6]; coating a layer of surfactant [10]; or transferring the charge from a PDMS stamp [16,17]. The electrostatic interaction between the incoming particles and the charged collecting surface preferentially attracts the particles to the patterned regions.…”
Section: Introductionmentioning
confidence: 99%