1994
DOI: 10.1126/science.8284671
|View full text |Cite
|
Sign up to set email alerts
|

Nanometer Spatial Resolution Achieved in Hard X-Ray Imaging and Laue Diffraction Experiments

Abstract: Tapered glass capillaries have successfully condensed hard x-ray beams to ultrasmall dimensions providing unprecedented spatial resolution for the characterization of materials. A spatial resolution of 50 nanometers was obtained while imaging a lithographically prepared gold pattern with x-rays in the energy range of 5 to 8 kiloelectron volts. This is the highest resolution scanning x-ray image made to date with hard x-rays. With a beam 360 nanometers in diameter, Laue diffraction was observed from the smalles… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1

Citation Types

0
92
0
2

Year Published

1998
1998
2017
2017

Publication Types

Select...
7
3

Relationship

0
10

Authors

Journals

citations
Cited by 214 publications
(94 citation statements)
references
References 12 publications
0
92
0
2
Order By: Relevance
“…This beam energy enables the analysis of the elements with atomic number between 14 (Si) and 38 (Sr). On beamline L the beam was focused with polycapillary optics [27] to the size of 15 lm in diameter whilst on the ID 22 with the use of parabolic compound refractive lenses [28] to a spot size of 5 lm · 2 lm (horizontally (H) · vertically (V)). Twodimensional distributions of elements were determined.…”
Section: Methodsmentioning
confidence: 99%
“…This beam energy enables the analysis of the elements with atomic number between 14 (Si) and 38 (Sr). On beamline L the beam was focused with polycapillary optics [27] to the size of 15 lm in diameter whilst on the ID 22 with the use of parabolic compound refractive lenses [28] to a spot size of 5 lm · 2 lm (horizontally (H) · vertically (V)). Twodimensional distributions of elements were determined.…”
Section: Methodsmentioning
confidence: 99%
“…Relatively high-energy X-rays are used to produce X-ray¯uor-escence because the X-ray¯uorescence yield becomes larger for heavy elements. Typical X-ray focusing devices are a Kirkpatrick± Baez grazing-incidence mirror (Suzuki & Uchida, 1992), a thick Fresnel (Kamijo et al, 1997) or Bragg±Fresnel zone plate (Erko et al, 1994), and a capillary tube (Bilderback et al, 1994). A new compound refractive lens (Snigirev et al, 1996) has also been reported.…”
Section: Introductionmentioning
confidence: 99%
“…However, recent theoretical and experimental research results have shown that the linear zone plate can be used to focus hard X-rays up to 20 keV [7][8][9][10]. A spot size of about 90 nm has been achieved with glass capillary optics [11]. But the capillary optics did not preserve the coherence of the X-ray beams.…”
Section: Introductionmentioning
confidence: 99%