Nanomechanical Proximity Perturbation for Switching in Silicon-Based Directional Couplers for High-Density Photonic Integrated Circuits

Chatterjee, Rohit; Wong, Chee Wei

doi:10.1109/jmems.2010.2043216

Cited by 11 publications

(14 citation statements)

References 32 publications

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“…Tunable couplers have been commonly used as switches, and for this purpose, Chatterjee et al demonstrated in-plane perturbation of a static directional coupler using comb-drive actuation [85]. Out-of-plane variants using absorbing metals are also possible, and have been demonstrated using aluminum [62], and gold [86].…”

Section: Switchesmentioning

confidence: 99%

MEMS for Photonic Integrated Circuits

Errando-Herranz

Takabayashi

Edinger

et al. 2020

IEEE J. Select. Topics Quantum Electron.

104

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Section: Switchesmentioning

confidence: 99%

MEMS for Photonic Integrated Circuits

Errando-Herranz

Takabayashi

Edinger

et al. 2020

IEEE J. Select. Topics Quantum Electron.

104

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show abstract

“…It should also be noted that the near-field perturbation mechanism can be applied to other photonic structures as well, e.g., waveguides [ 84 ] and waveguide couplers [ 85 ] for developing into optical phase modulators and switches. Besides light modulation, this mechanism is also widely used for transduction and sensing [ 86 , 87 , 88 ].…”

Section: Mems/nems Tunable Si Photonicsmentioning

confidence: 99%

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Chau

Zhou

2016

Micromachines

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This article reviews mechanically-tunable photonic devices with on-chip integrated MEMS/NEMS actuators. With related reports mostly published within the last decade, this review focuses on the tuning mechanisms of various passive silicon photonic devices, including tunable waveguides, couplers, ring/disk resonators, and photonic crystal cavities, and their results are selectively elaborated upon and compared. Applications of the mechanisms are also discussed. Future development of mechanically-tunable photonics is considered and one possible approach is based on plasmonics, which can confine light energy in the nano-scale space. Optomechanics is another innovation, derived from the strong coupling of optical and mechanical degrees of freedom. State-of-the-art studies of mechanically-tunable plasmonics and on-chip optomechanics are also selectively reviewed.

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“…Interestingly they used an in-plane configuration on a silicon platform, with a comb-drive actuator. At the difference of gap-closing actuators, the use of the comb-drive allowed for precise control of the coupling [ 23 ]. The device had a speed of 14 μs and presented a modest maximum extinction of 7 dB, presumably because the fabrication process (edge roughness) did not allow to decrease the gap below 150 nm.…”

Section: Devices Based On Interaction With the Waveguide Evanescenmentioning

confidence: 99%

Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

Chollet

2016

Micromachines

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The convergence of Micro Electro Mechanical Systems (MEMS) and optics was, at the end of the last century, a fertile ground for a new breed of technological and scientific achievements. The weightlessness of light has been identified very early as a key advantage for micro-actuator application, giving rise to optical free-space MEMS devices. In parallel to these developments, the past 20 years saw the emergence of a less pursued approach relying on guided optical wave, where, pushed by the similarities in fabrication process, researchers explored the possibilities offered by merging integrated optics and MEMS technology. The interest of using guided waves is well known (absence of diffraction, tight light confinement, small size, compatibility with fiber optics) but it was less clear how they could be harnessed with MEMS technology. Actually, it is possible to use MEMS actuators for modifying waveguide properties (length, direction, index of refraction) or for coupling light between waveguide, enabling many new devices for optical telecommunication, astronomy or sensing. With the recent expansion to nanophotonics and optomechanics, it seems that this field still holds a lot of promises.

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Nanomechanical Proximity Perturbation for Switching in Silicon-Based Directional Couplers for High-Density Photonic Integrated Circuits

Cited by 11 publications

References 32 publications

MEMS for Photonic Integrated Circuits

MEMS for Photonic Integrated Circuits

Mechanically-Tunable Photonic Devices with On-Chip Integrated MEMS/NEMS Actuators

Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review

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