Nanomaterials for Sustainable Energy Applications

Sonkar, Piyush Kumar; Ganesan, V.

doi:10.1201/9781003208709

Cited by 1 publication

(2 citation statements)

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“…After retrieving the error coefficients e 00 , e 01 , and e 11 , the raw S m 11 data from the SCM test sample and the verification standard were corrected using equation (3). Interpolation was employed on the simulated grid to determine the corresponding permittivities and loss tangents.…”

Section: Application Example Srammentioning

confidence: 99%

“…The demand for characterization at the micro-and nanoscale is steadily increasing in both industry and research, particularly in the realms of integration, miniaturization, material properties, and quality control. This need spans various fields, ranging from the semiconductor industry, bionanotechnology to electrochemistry, where scanning probe microscopes, equipped with a diverse array of measurement modes, play a crucial role [1][2][3]. In addition to pursuing higher sensitivities of these instruments, the importance of achieving reliable, quantitative, and therefore comparable results is becoming more important.…”

Section: Introductionmentioning

confidence: 99%

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Coaxial tips for a scanning microwave microscope and its calibration with dielectric references

Eckmann,

Herzog,

Lin

et al. 2024

Meas. Sci. Technol.

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Scanning microwave microscopy is a combination of an atomic force microscope with a vector network analyzer to measure locally resolved impedances. The technique finds application in the realms of semiconductor industries, material sciences, or biology. To determine quantitative material properties from the measured impedances, the system must be calibrated. Transferring the calibration from the calibration substrate onto the material under test is strongly limited when using unshielded probes, as the electromagnetic coupling to the surroundings can reach several centimeters. This work reports the fabrication of coaxially shielded probes for a scanning microwave microscope and their integration into such an instrument. We discuss a calibration method with dielectric references, using a simulation-assisted 1-port VNA calibration algorithm. Uncertainty considerations of the measurement process are included and propagation throughout the algorithm is performed. The calibration is verified with an additional dielectric reference. As an application example, the results for a static-random-access memory sample are presented. We identified system-related drift and trace noise as the dominant contributors to the uncertainties of the calibrated results. The here presented shielded tips can broaden the application scope of scanning microwave microscopy, as they are door-openers for measurements in liquids.

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Section: Application Example Srammentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%