Nanolithography by local anodic oxidation of metal films using an atomic force microscope

Held, R.; Heinzel, T.; Studerus, P.; Ensslin, Klaus

doi:10.1016/s1386-9477(98)00153-2

Cited by 46 publications

(31 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…However, we are able to vary the FWHM by varying the tip shape and the tip-sample distance. We have been able to create structures with FWHM of 20 nm, which is to our knowledge the best lateral resolution which can be achieved [23,25,27].…”

Section: The Local Anodic Oxidation (Lao)mentioning

confidence: 95%

“…Due to the larger lattice constant of oxide compared to the metal lattice constant, a thickening of the native oxide layer by LAO induces the creation of nanostructures above the surface. The formation of the nanostructures depends typically on the substrate, the degree of relative humidity [23,24], the tip shape [25], the distance between the tip and the sample [26], the tip velocity (see Fig. 2) and the applied voltage (see Fig.…”

Section: The Local Anodic Oxidation (Lao)mentioning

confidence: 99%

See 1 more Smart Citation

Creation of nanostructures to study the topographical dependency of protein adsorption

Galli

Coen

Hauert

et al. 2002

Colloids and Surfaces B: Biointerfaces

View full text Add to dashboard Cite

Nanostructures of sizes comparable to protein dimensions are created on Si and Ti surfaces by local anodic oxidation (LAO) using the atomic force microscope (AFM). The characterization of the surface by X-ray photoelectron spectroscopy (XPS) reveals that this method assures a modification of the topography of the surface without a change of its chemical composition. Surfaces structured by LAO therefore represent ideal systems to study the dependence of protein adsorption on topography. We are able to visualize the created nanostructures with an AFM and successively adsorb the proteins in situ, rinse and image the new surface. The densities of adsorbed proteins on the nanostructured and neat surfaces are compared and we find that the protein arrangement depends on the underlying nanostructures, showing that proteins can ''sense'' the topography of surfaces at the nanometer scale. This result can be considered as the nanoscale analogous of the adsorption found for cell systems on micrometer structures.

show abstract

Section: The Local Anodic Oxidation (Lao)mentioning

confidence: 95%

Section: The Local Anodic Oxidation (Lao)mentioning

confidence: 99%

Creation of nanostructures to study the topographical dependency of protein adsorption

Galli

Coen

Hauert

et al. 2002

Colloids and Surfaces B: Biointerfaces

View full text Add to dashboard Cite

show abstract

“…It has been reported that the main factors controlling the pattern size are the ambient humidity level, scanning speed, pulse duration, bias applied, and tip radius. 25,26 Furthermore, the dimension of the dot is strongly dependent on the initial roughness of the metal substrate and drift of the tip during the patterning process, which results in pattern broadening.…”

Section: Methodsmentioning

confidence: 99%

“…17,18 CSAFM has also been used to create nanosized surface oxide structures on metal and semiconductor surfaces. [19][20][21][22][23][24][25][26][27][28][29] Many kinds of metal oxides, such as TiO 2 , 20,24 -26 Al 2 O 3 , 21,27 and Cr oxides 28 were fabricated using CSAFM. It is generally believed that oxide is formed as a result of anodic oxidation with the tip and the ambient moisture layer between the tip and the substrate acting as a nanosized counter electrode and an electrolyte solution, respectively, as schematically shown in Fig.…”

Section: Introductionmentioning

confidence: 99%

Formation and electric property measurement of nanosized patterns of tantalum oxide by current sensing atomic force microscope

Kim¹,

Zhao²,

Uosaki³

2003

Journal of Applied Physics

View full text Add to dashboard Cite

Nanosized patterns of tantalum oxide were fabricated on a tantalum substrate by applying a potential pulse utilizing current sensing atomic force microscopy ͑CSAFM͒. The dimensions of the dots were strongly dependent on the bias applied, scan rate, and potential pulse duration. By controlling these variables, the minimum size nanodots with full width at half maximum of 35 nm was achieved. Immediately after pattern formation, the electrical properties of the Ta oxide nanodots were measured using CSAFM. The charge transport at the CSAFM tip and the nanosized Ta oxide dot can be described by Poole-Frenkel type conduction. The relative dielectric constant of the nanosized Ta 2 O 5 dots was calculated to be 17. 8 -24.3, showing that the quality of the oxide was high. In addition, by controlling the substrate bias applied, pulse duration, and tip scan speed, nanosized Ta oxide lines with the desired dimensions were prepared.

show abstract

“…[2][3][4][5][6] However, the currently available nanolithography software packages used to design patterns that should be pictured on a processed surface offer a broad range of advanced, but somewhat restricted features. Additionally, all of them are system specific, which makes it difficult to share the pattern designed for a particular SPM system with a colleague working on a different system.…”

Section: Introductionmentioning

confidence: 99%

Data coding tools for color-coded vector nanolithography

Lekki¹,

Kumar

Parihar

et al. 2004

Review of Scientific Instruments

View full text Add to dashboard Cite

We propose and demonstrate the ability and efficiency of using a universal file format for a nanolithography pattern. A problem faced by the physicists working in the field of nanolithography is a lack of a flexible pattern design software (possibly open-source) that could be applied in combination with a broad range of commercial scanning probe microscope (SPM) systems. The current nanolithography software packages are device-specific and not portable. Therefore, it is impossible to make a lithography pattern and share it with fellow physicists working on a networked sub-system. In this paper we describe the software designed to read and interpret a nanolithography pattern stored in a Windows Metafile (WMF) standard graphic format and next to draw it on a substrate using an SPM tip. The nanolithography parameters like height, velocity, feedback force, etc. are coded in the color of the WMF onto the RGB channels of the image establishing a distinct relation between a graphical feature (color) and the used nanolithography scheme (voltage, height, etc.). The concept enables preparation of complex patterns using any standard graphic software and aids an intuitive recognition of the mode and parameters set for a pattern. The advantages of using a WMF over other approaches and the universal scope of the software are discussed.

show abstract

Nanolithography by local anodic oxidation of metal films using an atomic force microscope

Cited by 46 publications

References 7 publications

Creation of nanostructures to study the topographical dependency of protein adsorption

Creation of nanostructures to study the topographical dependency of protein adsorption

Formation and electric property measurement of nanosized patterns of tantalum oxide by current sensing atomic force microscope

Data coding tools for color-coded vector nanolithography

Contact Info

Product

Resources

About