Nanoindentation of patterned metal lines on a Si substrate

Choi, Yong-Sung; Suresh, S.

doi:10.1016/s1359-6462(02)00377-9

Cited by 35 publications

(19 citation statements)

References 8 publications

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“…The initial elastic P -h response matches well with the elastic response for a spherical indentation 12 when the spherical tip radius is assumed to be 500 nm. 15 The initial deviation from the elastic response, which occurs over a load range of 45-65 N, is approximately independent of linewidth w. The corresponding maximum shear stress sustained by the indented film and lines are 1.8 -2.0 GPa at the point of first deviation from the elastic response, which compares well with the theoretical shear strength of Al ͑ϳ2.7 GPa͒, and is similar to the trends documented for continuous films of Al and Cu. 8,9 The indentation compliance, which can be represented by the curvature of the loading response, is also unaffected by linewidth prior to the first deviation.…”

Section: Nanoindentation Results For Patterned Linesmentioning

confidence: 99%

Size effects on the onset of plastic deformation during nanoindentation of thin films and patterned lines

Choi

Vliet

et al. 2003

Journal of Applied Physics

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Plastic deformation of materials exhibits a strong size dependence when the relevant physical length scales are in the range of microns or below. Recent progress in experimental and computational nanoindentation allows us to investigate the mechanical response of nanoscale material volumes, particularly the transition from elastic to plastic deformation and the early stages of plastic deformation. We present a systematic experimental study of nanoindentation on continuous films and unidirectionally patterned lines on substrates to explore the effects of two size scales ͑film thickness t and linewidth w͒ on the early stages of plastic deformation via the investigation of the nanoindentation P -h response. The observed experimental trends indicate that early stage plasticity is strongly size dependent, a feature that cannot be rationalized on the basis of continuum concepts. Computational simulations of these nanoindentation experiments through finite element modeling and molecular dynamics are conducted to elucidate the mechanisms by which this incipient plasticity progresses in the material by correlating observations from both experiments and computations.

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Section: Nanoindentation Results For Patterned Linesmentioning

confidence: 99%

Size effects on the onset of plastic deformation during nanoindentation of thin films and patterned lines

Choi

Vliet

et al. 2003

Journal of Applied Physics

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“…This technique is especially well suited for the characterisation of small volumes of materials, such as single grains or phases in a composite [3], dislocation dynamics [4], small structures [5] or thin films and coatings [6]. The nanoindentation test is one of the most developed techniques, which can provide information about the mechanical behaviour of the material when it is being deformed…”

Section: Introductionmentioning

confidence: 99%

Mechanical Characterisation at Nanometric Scale of a New Design of SOFCs

et al. 2010

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The mechanical stability is an important parameter to gain knowledge in the potential applications of a novel design of electrolyte‐supported SOFC, based on yttria‐stabilised zirconia (YSZ) and NiO‐YSZ composites, with cross‐linked channels (∼90 μm of diameter). In this experimental work, the mechanical properties (hardness, H and Young's modulus, E) at different applied loads have been studied using the nanoindentation technique and the equivalent indenter method. On the other hand, the different fracture mechanisms have been determined using atomic force microscopy (AFM), observing the plastic behaviour that takes place during the indentation process. H value for YSZ is higher than that for NiO‐YSZ, while E values for YSZ and NiO‐YSZ are 260 ± 15 and 205 ± 20 GPa, respectively. Only YSZ samples present several radial cracks at the corners nucleated by sharp indentation, thus indicating that H values have been underestimated.

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“…Moreover, this technique is especially well suited for the characterization of small volumes of material, such as single grains or phases in a composite (Roa et al, 2007), dislocation dynamics (Gaillard et al, 2006), small structures (Choi et al, 2003) or thin films and coatings (Gaillard et al, 2008;Beegan et al, 2005;Roa et al, 2009aRoa et al, , 2011aRayon et al, 2011). Finally, this technique eliminates the need to visualize the imprints produced during the test for homogeneous materials, which makes the extraction of mechanical properties easier.…”

Section: Nanoindentationmentioning

confidence: 99%