2010
DOI: 10.1016/j.diamond.2010.08.014
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Nanoindentation-induced deformation behaviour of tetrahedral amorphous carbon coating deposited by filtered cathodic vacuum arc

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Cited by 5 publications
(2 citation statements)
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“…Investigation of the data reported in XTEM studies by Haq and co-workers clearly shows that the influence of indenter geometry is greater than that of coating thickness [38][39][40][41]. In the micro-scratch test the indenter radius was 25 m so compressive strain in the coating should be minimal.…”
Section: Deformation Mechanism In the Scratch Testmentioning
confidence: 99%
“…Investigation of the data reported in XTEM studies by Haq and co-workers clearly shows that the influence of indenter geometry is greater than that of coating thickness [38][39][40][41]. In the micro-scratch test the indenter radius was 25 m so compressive strain in the coating should be minimal.…”
Section: Deformation Mechanism In the Scratch Testmentioning
confidence: 99%
“…Besides, the deposition methods determine its nature of DLC film. Usually, superhard tetrahedral carbon (ta‐C) film is grown by filtered cathodic vacuum arc (FCVA), 12,13 hydrogenated tetrahedral amorphous carbon (ta‐C:H) film is obtained via electron cyclotron wave resonance (ECR) plasma system, 14 and (hydrogenated) amorphous carbon (a‐C:(H)) films are deposited from plasma assistant chemical vapor deposition (PECVD) 15–18 and magnetron sputtering technology 16 . Among them, magnetron sputtering, due to its less equipment requirements, low cost and more flexibility, has been taken more attention via science and engineering 17 .…”
Section: Introductionmentioning
confidence: 99%