2006
DOI: 10.1364/oe.14.008360
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Nanoindentation and birefringence measurements on fused silica specimen exposed to low-energy femtosecond pulses

Abstract: Bellouard, Y.J.; Colomb, T.; Depeursinge, C.; Dugan, M.; Said, A.A.; Bado, P. Please check the document version of this publication:• A submitted manuscript is the author's version of the article upon submission and before peer-review. There can be important differences between the submitted version and the official published version of record. People interested in the research are advised to contact the author for the final version of the publication, or visit the DOI to the publisher's website.• The final au… Show more

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Cited by 72 publications
(62 citation statements)
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“…8). In the psregime, etched lengths of about 120-150 μm are obtained in the whole range of fluences explored in this study (0.5-4500 J/mm The faster etching rate observed in ultra-short pulse laser irradiated silica glass as compared to pristine glass has been ascribed to the structural modification of the material [8], to densification [9] or to the presence of nano-cracks within nanogratings [29]. To distinguish the contributions of nanogratings to the etching process at different fluence regimes, we looked at correlations between the laser induced birefringence (Fig.…”
Section: Assessment Of Ps-lasers For Micro-machining By Chemical Etchmentioning
confidence: 65%
See 2 more Smart Citations
“…8). In the psregime, etched lengths of about 120-150 μm are obtained in the whole range of fluences explored in this study (0.5-4500 J/mm The faster etching rate observed in ultra-short pulse laser irradiated silica glass as compared to pristine glass has been ascribed to the structural modification of the material [8], to densification [9] or to the presence of nano-cracks within nanogratings [29]. To distinguish the contributions of nanogratings to the etching process at different fluence regimes, we looked at correlations between the laser induced birefringence (Fig.…”
Section: Assessment Of Ps-lasers For Micro-machining By Chemical Etchmentioning
confidence: 65%
“…The etching rate of fs-laser irradiated regions has been shown to depend upon the stress and densification in the glass in the low fluence regime and by the nanogratings' orientation in the high fluence regime [9,27]. Hence, the formation of nanogratings by 8 ps-pulses and the concurrent build-up of stress in the regions surrounding the laser tracks will have an impact on the two-step machining by laser irradiation and chemical etching.…”
Section: Assessment Of Ps-lasers For Micro-machining By Chemical Etchmentioning
confidence: 99%
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“…These structural modifications can be of various kinds: defects but also formation of smaller SiO 4 -ring structures (as suggested by Raman observations [19,20]) that lead to a gradual densification effect. The hypothesis of laserinduced densification is supported by nano-indentations experiments [21]. If a localized densification take place in a confined and well defined region (as suggested by experimental evidences presented in [11] and [20]), the region surrounding will be put under tensile stress in order to accommodate the local change of volume.…”
Section: Interpretation and Hypothesesmentioning
confidence: 92%
“…Stress estimation is facilitated through photoelasticity, which gives a direct measurement of the induced stress in the test beam [69,70]. False color intensity retardance maps (Figure 1c) of the loaded test beam are generated with a standard microscope (Olympus BX51, Tokyo, Japan) fitted with a commercial system to measure optical retardance (LC-Polscope, CRI, Cambridge, MA, USA).…”
Section: Stress Monitoring Through Photoelasticitymentioning
confidence: 99%