Abstract:This chapter describes the principle of nanoimprint lithography, different nanoimprint forms and their relative merits and shortcomings, key factors in nanoimprinting (masks, materials, pressing methods and imprinting pressure uniformity, material dispensing methods, vacuum, mold separation), examples of nanoimprinting in magnetic nanostructure fabrication, control of magnetic structure properties by patterning, the principle of quantized magnetic disks (QMDs) (patterned magnetic media), and the fabrication an… Show more
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