Nanoimprint lithography for high-throughput fabrication of metasurfaces

Liquid crystal-powered Mie resonators for electrically tunable photorealistic color gradients and dark blacks

“…However, a key hurdle to overcome before realizing such metasurface-based displays comes from limitations in large-scale nanofabrication. Recently, advances in nanoimprinting techniques have suggested a potential answer 11 , in particular, roll-to-roll printing could achieve the continuous printing of metasurfaces. Resin embedded with high- n dielectric nanoparticles has been proven as an exciting material for such nanoimprinting methods, and has also been used in direct 3D printing using two-photon lithography.…”

“…By utilizing nanoscale structures, the operating wavelengths of metasurfaces are moved to the visible regime, thus providing a platform for high-resolution and -performance nano-optics with an extremely small form factor. Upon continuous advances in nanofabrication techniques 11 , commercially viable metasurfaces are becoming a reality. Along with controlling the wavefront of light for focusing and imaging with metalenses, display technology using metaholography or advanced color filters is another promising application of metasurfaces that could have profound impacts in many fields such as direct view displays, image projection systems, and even micro-displays for augmented reality (AR) headsets.…”

Metasurface-empowered spectral and spatial light modulation for disruptive holographic displays

“…In this section, we will describe state-of-the-art nanofabrication technologies for mass production of a metasurface-based holographic display platform, driving the development from lab scale to industrial scale. [204][205][206] At the lab scale, metasurfaces are generally prepared using electron beam lithography (EBL) with fine critical dimensions. However, to move forward to the scalable preparation of metasurfaces with micro-or nanostructures, various non-conventional preparation techniques are required.…”

Scalable, Lithography-Free Plasmonic Metasurfaces by Nano-Patterned/Sculpted Thin Films for Biosensing

“…Top-down nanofabrication methods (like laser/ e-beam lithography) are still the gold standard for nanoantennas fabrication. Recent approaches offer scalable, high-throughput nanofabrication (see Figure 1A) like nanostencil lithography based on shadow-masked nanopattering and nanoimprint lithography (Su et al, 2021), where nano-patterning is based on thermal or mechanical deformation of imprint materials (Oh D. K. et al, 2021). Although the previously described processes have a high potential to achieve scalable and cost-effective nanofabrication at the wafer scale, these processes maintain the following main challenge: a master nano-mold/pattern is required to transfer metasurfaces with an associated high cost.…”