Nanofabrication: the unsung hero in enabling advances in nanophotonics

Chengfeng, Pan; Shutao, Zhang; Farsari, Maria; Oh, Sang Hyun; Yang, Joel K. W.

doi:10.1515/nanoph-2023-0217

Cited by 3 publications

(2 citation statements)

References 24 publications

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“…[31][32][33][34][35] For several decades, electron-beam lithography (EBL) has been used to fabricate metasurfaces with subwavelength structures that are smaller than the diffraction limit of photolithography. [36][37][38][39][40] However, EBL encounters various problems, such as high cost, low productivity, and difficulty in forming patterns over large areas. Recently, the development of semiconductor processes has facilitated the use of ArF laser photolithography to fabricate subwavelength-sized metasurfaces.…”

Section: Introductionmentioning

confidence: 99%

High‐Throughput Fabrication of Large‐Scale Metaholograms via One‐step Printing

Park,

Kim,

Kim

et al. 2024

Advanced Optical Materials

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Metasurfaces, which are designed by arranging meta‐atoms, have attracted attention for their ability to create optical properties that do not exist in nature. However, previous methods for fabricating metasurfaces using electron‐beam lithography (EBL) are expensive and have limited production capacity, inhibiting mass production. In this study, a new manufacturing method is demonstrated using an argon fluoride (ArF) scanner and nanoimprint lithography (NIL) to overcome these limitations. 266 millimeter‐scale metasurfaces are designed and fabricated on an 8‐inch wafer using an ArF scanner. Subsequently, this is used as a master stamp to replicate the metasurfaces in an 8‐inch wafer scale through the NIL process all at once. To demonstrate the effectiveness of this method, a metahologram is designed and manufactured using TiO2 nanoparticle‐embedded‐resin (nano‐PER). The metahologram achieves an 81.2% yield during replication, with a maximum efficiency of 60.7% at 450 nm, 45.1% at 532 nm, and 38.5% at 635 nm, respectively. The results demonstrate the production of practical metaholograms using low‐cost and high‐throughput processes.

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Section: Introductionmentioning

confidence: 99%

High‐Throughput Fabrication of Large‐Scale Metaholograms via One‐step Printing

Park,

Kim,

Kim

et al. 2024

Advanced Optical Materials

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“…This positive insight holds promising implications for the realm of all-dielectric nanophotonics, providing an added incentive to enhance nanofabrication technology and attain sub-10 nm gaps. A narrowing of the nanogap is clearly one of the best ways to improve a nanoantenna’s performance, however it remains extremely challenging to consistently control on multiple structures. − …”

mentioning

confidence: 99%

Fluorescence Enhancement in Topologically Optimized Gallium Phosphide All-Dielectric Nanoantennas

Vidal,

Tilmann,

Tiwari

et al. 2024

Nano Lett.

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Nanoantennas capable of large fluorescence enhancement with minimal absorption are crucial for future optical technologies from single-photon sources to biosensing. Efficient dielectric nanoantennas have been designed, however, evaluating their performance at the individual emitter level is challenging due to the complexity of combining high-resolution nanofabrication, spectroscopy and nanoscale positioning of the emitter. Here, we study the fluorescence enhancement in infinity-shaped gallium phosphide (GaP) nanoantennas based on a topologically optimized design. Using fluorescence correlation spectroscopy (FCS), we probe the nanoantennas enhancement factor and observe an average of 63-fold fluorescence brightness enhancement with a maximum of 93-fold for dye molecules in nanogaps between 20 and 50 nm. The experimentally determined fluorescence enhancement of the nanoantennas is confirmed by numerical simulations of the local density of optical states (LDOS). Furthermore, we show that beyond design optimization of dielectric nanoantennas, increased performances can be achieved via tailoring of nanoantenna fabrication.

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Coevolution of nanophotonics and nanofabrication: achievements and beyond

Wang,

Yang

2024

Photonics Insights

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Nanofabrication: the unsung hero in enabling advances in nanophotonics

Cited by 3 publications

References 24 publications

High‐Throughput Fabrication of Large‐Scale Metaholograms via One‐step Printing

High‐Throughput Fabrication of Large‐Scale Metaholograms via One‐step Printing

Fluorescence Enhancement in Topologically Optimized Gallium Phosphide All-Dielectric Nanoantennas

Coevolution of nanophotonics and nanofabrication: achievements and beyond

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