Nanofabrication of millimeter-level nanostructure via laser-focused atomic deposition

Zhang, Tong; Yin, Cong; Zhao, Yuejin; Qian, Jin; Wang, Jianbo; Shi, Chaowei

doi:10.7567/apex.11.092003

Cited by 3 publications

(2 citation statements)

References 31 publications

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“…This technology was expected to play an important role in the fabrication of metal micro/nano structures for further applications in photonics and electronics [76]. In 2018, T. Zhang et al described the fabrication of a large area of parallel and uniform nanoscale lines covering millimeter-scale deposition areas by laser focusing techniques [77]. In summary, by the use of spatially modulated femtosecond laser patterning has achieved a minimum linewidth of metal nanowires of 56 nm.…”

Section: Nanowiresmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

Yang

Wei

et al. 2019

Nanomaterials

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Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

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Section: Nanowiresmentioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

Yang

Wei

et al. 2019

Nanomaterials

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“…The nanometer-scale lines created with this method are parallel and uniform and could cover a millimeter level area. 4) In contrast to other high resolution lithography techniques such as X-ray or electron beam, where the resolution is limited by the wavelength of the light due to diffraction, atomic deposition has a potentially higher accuracy because the feature size is not significantly limited by diffraction since the atomic de Broglie wavelength is in the picometer range. This kind of experiment has been performed using Cr, 2,5) Al, 6) Na, 7) Yb, 8) Fe 9,10) and so on.…”

mentioning

confidence: 99%

Fabrication of nanostructures with complex spatial frequency via laser-focused atomic deposition

Zhang

Yin

Zhao

et al. 2019

Appl. Phys. Express

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In this paper we report on experiments generating complex one-dimensional nanoscale patterns with the laser-focused atomic deposition technique. A beam of collimated chromium atoms intersect with an exact on-resonant laser standing wave at 7S3 → 7 transition of 52Cr. With the usage of proper laser intensity and reflectivity of the retroreflecting mirror, which are used to form the standing wave, nanolines with complex spatial frequencies (both λ/2 and λ/4) can be fabricated in one-step deposition. The proportion of the two structures could be 1:1.

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Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

et al. 2022

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Atom lithography is a unique method to fabricate self-traceable pitch standards and angle standards, but extending its structure area to millimeter-level for application is challenging. In this paper, on the one hand, we put forward a new approach to fabricate a full-covered self-traceable Cr nanograting by inserting and scanning a Dove prism in the Gaussian beam direction of atom lithography. On the other hand, we extend the structure area along the standing-wave direction by splicing two-step atom deposition. Both nanostructures manufactured via scanning atom lithography and splicing atom lithography demonstrate good pitch accuracy, parallelism, continuity, and homogeneity, which opens a new way to fabricate centimeter-level full-covered self-traceable nanograting and lays the basis for the application of square ruler and optical encoders at the nanoscale.

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Nanofabrication of millimeter-level nanostructure via laser-focused atomic deposition

Cited by 3 publications

References 31 publications

The Fabrication of Micro/Nano Structures by Laser Machining

The Fabrication of Micro/Nano Structures by Laser Machining

Fabrication of nanostructures with complex spatial frequency via laser-focused atomic deposition

Scanning and Splicing Atom Lithography for Self-traceable Nanograting Fabrication

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