2012
DOI: 10.1007/978-3-642-28079-5_9
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Nanofabrication for Plasmonics

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Cited by 15 publications
(13 citation statements)
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“…Arrays of gold and aluminum nanoparticles were made using electron beam lithography, which allows the realization of nanostructures with well-controlled size, shape and period [40]. The gold nanoparticles are 50 nm thick nanodisks and were deposited onto a glass substrate with a 3 nm thick TiO 2 layer to ensure adhesion of gold onto glass.…”
Section: A Sample Fabricationmentioning
confidence: 99%
“…Arrays of gold and aluminum nanoparticles were made using electron beam lithography, which allows the realization of nanostructures with well-controlled size, shape and period [40]. The gold nanoparticles are 50 nm thick nanodisks and were deposited onto a glass substrate with a 3 nm thick TiO 2 layer to ensure adhesion of gold onto glass.…”
Section: A Sample Fabricationmentioning
confidence: 99%
“…Aluminum nanoantennas consisting of nanorods were fabricated by electron beam lithography and lift-off process on a STEM-EELS compatible substrate, that is, a 30 nm thick Si 3 N 4 membrane. The length of the nanorods varies from 60 nm to 1 μm while keeping a 60 nm constant width.…”
mentioning
confidence: 99%
“…In order to overpass this limitation, we developed a novel scanning microscope based on the tapered fiber lens. Figure 4 (a) shows a gold Asian umbrella nanostructured sample fabricated by electron-beam lithography method [27]. It plays a role as a standard sample in the following experiments.…”
Section: Development Of Som and Its Use For Fiber Optics Polymer Lensmentioning
confidence: 99%