Nanofabrication by Photons

Cui, Zheng

doi:10.1007/978-0-387-75577-9_2

Cited by 4 publications

(3 citation statements)

References 64 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…According to the previous research results, the surface form accuracy of each DUV lens should be 2 nm rms; and the MSFR error should be 0.3 nm rms [51][52][53][54][55][56]. As the diameter of an atom is 0.1-0.2 nm, the atoms on the surface need to be removed layer by layer if the size fluctuation range of the machined surface is in the subnanometer order, which is the ultimate target processing accuracy, namely, atomic-level accuracy.…”

Section: State-of-the-art Precision Levelmentioning

confidence: 95%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

View full text Add to dashboard Cite

Precision is one of the most important aspects of manufacturing. High precision creates high quality, high performance, exchangeability, reliability, and added value for industrial products. Over the past decades, remarkable advances have been achieved in the area of high-precision manufacturing technologies, where the form accuracy approaches the nanometer level and surface roughness the atomic level. These extremely high precision manufacturing technologies enable the development of high-performance optical elements, semiconductor substrates, biomedical parts, and so on, thereby enhancing the ability of human beings to explore the macro- and microscopic mysteries and potentialities of the natural world. In this paper, state-of-the-art high-precision material removal manufacturing technologies, especially ultraprecision cutting, grinding, deterministic form correction polishing, and supersmooth polishing, are reviewed and compared with insights into their principles, methodologies, and applications. The key issues in extreme precision manufacturing that should be considered for future R&D are discussed.

show abstract

Section: State-of-the-art Precision Levelmentioning

confidence: 95%

Manufacturing technologies toward extreme precision

Zhang

Yan

Kuriyagawa

2019

Int. J. Extrem. Manuf.

View full text Add to dashboard Cite

show abstract

“…In UV NIL, a UV-curable liquid polymer resist is spread on a substrate and a transparent mold is pressed on it until the trenches are filled by the liquid resist. Afterwards, the polymer is cured into a solid film by UV exposure and then the mold is separated from the cured resist [14].…”

Section: Ag Hommentioning

confidence: 99%

Rapid production of structural color images with optical data storage capabilities

et al. 2015

View full text Add to dashboard Cite

In this paper, we present novel methods to produce structural color image for any given color picture using a pixelated generic stamp named nanosubstrate. The nanosubstrate is composed of prefabricated arrays of red, green and blue subpixels. Each subpixel has nano-gratings and/or sub-wavelength structures which give structural colors through light diffraction. Micro-patterning techniques were implemented to produce the color images from the nanosubstrate by selective activation of subpixels. The nanosubstrate can contain nanohole arrays, which after replication are converted to nanopillar arrays or vice versa. We have demonstrated that both visible and invisible information can be easily stored using these fabrication methods and the information can be easily retrieved. Therefore the techniques can be employed to produce personalized and customized color images for applications in optical document security and publicity, and can also be complemented by combined optical data storage capabilities.

show abstract

“…Therefore, there is an urgent need to develop new nanofabrication methods (which should be based on the “bottom-up” approach), among which FEBID is one of the most promising, allowing controlled creation of nanostructures with nanometer resolution . Such methods , exploit the irradiation of nanosystems with collimated electron beams. These can be used to create specific structural motifs of metal NPs for catalytic and nanoelectrochemistry applications; , to fabricate metal nanostructures for sensors, nanoantennas, magnetic devices, and surface coatings; and to prepare thin films with tailored properties for electronic devices and other applications.…”

Section: Introductionmentioning

confidence: 99%

Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment

Solov’yov,

Verkhovtsev,

Mason

et al. 2024

Chem. Rev.

View full text Add to dashboard Cite

This roadmap reviews the new, highly interdisciplinary research field studying the behavior of condensed matter systems exposed to radiation. The Review highlights several recent advances in the field and provides a roadmap for the development of the field over the next decade. Condensed matter systems exposed to radiation can be inorganic, organic, or biological, finite or infinite, composed of different molecular species or materials, exist in different phases, and operate under different thermodynamic conditions. Many of the key phenomena related to the behavior of irradiated systems are very similar and can be understood based on the same fundamental theoretical principles and computational approaches. The multiscale nature of such phenomena requires the quantitative description of the radiation-induced effects occurring at different spatial and temporal scales, ranging from the atomic to the macroscopic, and the interlinks between such descriptions. The multiscale nature of the effects and the similarity of their manifestation in systems of different origins necessarily bring together different disciplines, such as physics, chemistry, biology, materials science, nanoscience, and biomedical research, demonstrating the numerous interlinks and commonalities between them. This research field is highly relevant to many novel and emerging technologies and medical applications.

show abstract

Nanofabrication by Photons

Cited by 4 publications

References 64 publications

Manufacturing technologies toward extreme precision

Manufacturing technologies toward extreme precision

Rapid production of structural color images with optical data storage capabilities

Condensed Matter Systems Exposed to Radiation: Multiscale Theory, Simulations, and Experiment

Contact Info

Product

Resources

About