2000
DOI: 10.1063/1.126834
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Nanocrystalline p-type transparent Cu–Al–O semiconductor prepared by chemical-vapor deposition with Cu(acac)2 and Al(acac)3 precursors

Abstract: P-type transparent copper–aluminum–oxide semiconductor films are prepared by the use of the chemical-vapor deposition (CVD) technique with Cu(acac)2 and Al(acac)3 precursors. Transmission electron microscopy and electron diffraction suggest that the films contain nanocrystalline phases of CuAlO2 and Cu2O, in which CuAlO2 is dominant. Both Hall technique and Seebeck measurement reveal that the film is p type, and a very high room-temperature conductivity of 2 S cm−1 is achieved. This success of high-conductive … Show more

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Cited by 130 publications
(66 citation statements)
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“…Similar growth has been observed in nanocrystalline CuAlO 2 . 21 The d spacing observed do not match with that of Ag 2 O or ␤-AgGaO 2 . Energy dispersive x-ray analysis shows that the ratio of Ag/ Ga is 1.02, which is close to the atomic ratio of ␣-AgGaO 2 .…”
mentioning
confidence: 86%
“…Similar growth has been observed in nanocrystalline CuAlO 2 . 21 The d spacing observed do not match with that of Ag 2 O or ␤-AgGaO 2 . Energy dispersive x-ray analysis shows that the ratio of Ag/ Ga is 1.02, which is close to the atomic ratio of ␣-AgGaO 2 .…”
mentioning
confidence: 86%
“…The conductivity is highly anisotropic due to its structure 12 . CAO thin films are generally prepared by pulsed laser deposition (PLD) 2 , spray pyrolysis 13 , chemical vapour deposition 14 , sputtering [15][16][17][18] . TCO thin films for optoelectronics devices such as transparent solar cells and flat panel displays are commercially deposited using RF sputtering because of its capability of producing high purity thin films at lower temperatures.…”
Section: Introductionmentioning
confidence: 99%
“…Several CuMO 2 thin films have been reported with different conductivities and transparencies [5][6][7][8][9].…”
Section: Introductionmentioning
confidence: 99%