Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

López, Juan José Marín; Gordillo‐Vázquez, F. J.; Albella, J. M.

doi:10.1016/s0169-4332(01)00996-5

Cited by 11 publications

(3 citation statements)

References 19 publications

(35 reference statements)

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“…Hydrocarbon/argon-rich plasmas are nowadays widely used for the synthesis of nanocarbon structures in different kinds of microwave (MW) [1][2][3] and radio-frequency (RF) [4][5][6][7] plasma reactors using hot and room temperature substrates, respectively. However, in spite of the importance of discharges in hydrocarbons for plasma processing of nanocarbon structures, the connection between fundamental plasma properties, such as the electron density or the electron temperature, and the kinetics of particle formation in such plasmas is not yet completely understood.…”

Section: Introductionmentioning

confidence: 99%

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures

Gordillo‐Vázquez¹,

Camero

Gómez‐Aleixandre

2005

Plasma Sources Sci. Technol.

112

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This paper deals with optical emission spectroscopy studies of low pressure (0.1-0.5 Torr) capacitively coupled radiofrequency hydrocarbon/argon-rich plasmas used for the synthesis of nanocarbon structures. The main goal of this paper is to obtain the electron temperature of such far-from-equilibrium plasmas as a function of the pressure, the excitation power and the argon content. In doing so, we have found that the argon upper energy levels used for electron temperature estimation remain close to corona balance. The latter has allowed us to use a modified Boltzmann plot technique to derive the electron temperature. It was found that, for the plasmas investigated, an increase of the argon population density (from 10% to 95%) leads to a pronounced decrease of the electron temperature while an increase of the processing pressure produces a moderate increase of the electron temperature. Additionally, the increase of the power from 50 to 300 W produces a very slight growth of the electron temperature.

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Section: Introductionmentioning

confidence: 99%

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures

Gordillo‐Vázquez¹,

Camero

Gómez‐Aleixandre

2005

Plasma Sources Sci. Technol.

112

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“…Despite the degree of error, a significant trend was observed for both hardness and elastic modulus.The hardness and elastic modulus were shown to increase with deposition temperature. In both cases the hardness and modulus transition from values that are consistent with graphitic carbon (15 ± 10 and 450 ± 200GPa) at 600 °C to nanostructured diamond film values (32 ± 12 and 600 ± 200GPa) at 800 °C then to microcrystalline hardness and modulus (60 ± 10 and 700 ± 200) at 1000 °C [25][26][27]. Previous reported research on nanoindentation hardness and modulus of nanostructured diamond films has varied widely and is heavily dependent on the deposition method [28].…”

Section: 4nanoindentation Hardnessmentioning

confidence: 93%

Improved nanostructured diamond adhesion on cemented tungsten carbide with boride interlayers

Johnston

Baker

Catledge

2016

Diamond and Related Materials

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The application of diamond coatings for strengthening cemented tungsten carbide has been previously attempted, but suffers from delamination. Plasma enhanced chemical vapor deposition boriding improves the strength of cemented carbides by forming WCoB, W 2 CoB 2 , and/or CoB phases using controllable diborane stoichiometry;this research exploresthese borides as interlayers for nanostructured diamond coatings. Diamond deposition occurred between 600 °C and 1100 °C at 100 °C increments for 30 min to 4 hrs. Raman spectroscopy showed enhanced diamond growth compared to untreated WC-Co,however predominantlyWCoB and CoBphase interlayerssuffered from diamond film delamination. Examination by scanning electron microscopy and energy dispersive X-ray spectroscopy showed interfacial cobalt clusters on these interlayers. Predominantly W 2 CoB 2 phase interlayers showed improvement with a reduction in reactive cobalt, and improved adhesion of nanostructured diamond coatings. Diamond on W 2 CoB 2 was well adhered with deposition temperature dependentnanoindentationhardness ranging from 10 to 60 GPaand elastic modulus of 400 to 750 GPa. Scratch testing revealed cohesiveand adhesive failure of the diamond coatings at 5N ± 2N and 8N ±2N respectively and epoxy pull testing resulted in a surface adhesion tensile strength of 8.2 MPa ± .1MPa. The W 2 CoB 2 phaseis shown to be desirable as an interlayer for improved nanostructured diamondadhesion on cemented tungsten carbide.

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“…In 1985, the work by Matsumoto et al [24] showed the first evidence of the synthesis of polycrystalline diamond films from low-pressure MW (2.45 GHz) methane/molecular hydrogen plasmas. Further investigations starting in the late 1980s up to now have shown the feasibility of using RF and MW-driven, low-pressure PECVD to produce different kinds of carbon-based nanostructures (nano [25][26][27] or ultrananoparticles, [28] nanotubes, [29] nanowalls, [30] or nanotips [30] ) from a mixture of a hydrocarbon gas (or H-free precursors like C 60 ) and other functional gases (H 2 , N 2 , NH 3 , Ar, He...). Systematic investigation of plasma polymerization started only in the 1960s after the pioneering work published by J. Goodman in 1960 [31] showing the relevant dielectric properties of one micrometer thick film of polymerized styrene deposited by plasma.…”

Section: Introductionmentioning

confidence: 99%

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

Gordillo‐Vázquez¹,

Herrero²,

Tanarro³

2007

Chemical Vapor Deposition

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Low-pressure, plasma-enhanced (PE)CVD is a powerful and versatile technique that has been used for thin-film deposition and surface treatment since the early 1960s. However, it is only recently that it has been used in applications other than the different stages of microelectronic circuit fabrication. Now, PECVD is being used in emerging applications due to new materials and process requirements in a wide variety of areas, such as biomedical applications, solar cells, fuel cell development, fusion research, or the synthesis of silicon nanocrystals showing efficient photoluminescence, useful for future solid-state light sources. These new scenarios have stimulated further development of novel PECVD diagnostic techniques, together with fundamental experimental and theoretical studies aimed at a better understanding of some of the basic processes underlying the plasma/surface interaction. This paper gives an overview of some new research areas where PECVD is finding promising applications.

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Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Cited by 11 publications

References 19 publications

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures

Improved nanostructured diamond adhesion on cemented tungsten carbide with boride interlayers

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

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Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas

Cited by 11 publications

References 19 publications

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas used for the synthesis of nanocarbon structures

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H2/C2H2and Ar/H2/CH4plasmas used for the synthesis of nanocarbon structures

Improved nanostructured diamond adhesion on cemented tungsten carbide with boride interlayers

From Carbon Nanostructures to New Photoluminescence Sources: An Overview of New Perspectives and Emerging Applications of Low‐Pressure PECVD

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Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures

Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H₂/C₂H₂and Ar/H₂/CH₄plasmas used for the synthesis of nanocarbon structures