Nanocrystalline diamond films grown at very low substrate temperature using a distributed antenna array microwave process: Towards polymeric substrate coating

Baudrillart, Benoît; Bénédic, F.; Chauveau, Th.; Bartholomot, A.; Achard, Jocelyn

doi:10.1016/j.diamond.2017.01.001

Cited by 21 publications

(15 citation statements)

References 32 publications

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“…In this work, we investigate the low temperature synthesis of NCD films on various layered structures by using a distributed antenna array (DAA) system operating in H 2 /CH 4 /CO 2 gas mixture at low pressure (<1 mbar) . NCD films grown at 250 °C on ZnO/Si and ZnO/LiNbO 3 substrates, and finally on the ZnO/IDTs/LiNbO 3 layered structure suitable for WLAW devices, are characterized in terms of morphology and microstructure, and solutions are examined in order to preserve the substrate integrity.…”

Section: Introductionmentioning

confidence: 99%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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In this article, the nanocrystalline diamond (NCD) film low temperature deposition process on ZnO/Si, ZnO/LiNbO3, and ZnO/IDTs/LiNbO3 substrates is investigated aiming at obtaining layered structures suitable for waveguiding layer acoustic wave (WLAW) devices. The NCD synthesis is performed at 250 °C by using a distributed antenna array (DAA) microwave system operating in H2/CH4/CO2 gas mixture at low pressure (<1 mbar). Since the ZnO layer is etched during the NCD growth process, the deposition of a thin AlN layer of few hundred nanometers in thickness on the considered substrates is performed and is shown to be effective as a protective layer. Diamond growth on AlN‐coated ZnO/Si substrates emphasizes the ability of the DAA reactor to synthesize NCD films with properties similar to those obtained on silicon substrates. Besides adherent NCD films up to 300 nm thickness are synthesized on AlN‐coated ZnO/LiNbO3 substrates but stress in the layered structure appears during the plasma process. Finally, the feasibility of a NCD/AlN/ZnO/IDTs/LiNbO3 layered structure, suitable for WLAW devices, is successfully demonstrated, even if the NCD film adherence must be further improved on the inter‐digital transducers (IDTs) finger zone.

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Section: Introductionmentioning

confidence: 99%

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Dekkar

Bénédic

Floer

et al. 2018

Physica Status Solidi (a)

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“…Each of the sources is individually connected via a coaxial cable to a 200W solid-state microwave generator. Each of the seven microwave generators can independently frequency tuned to reduce the reflected power below 5 W. The reactor concept resembles in many points the Distributed Antenna Array (DAA) [4,14,23]. The major differences are the use of solidstate generators and auto matched microwave antennas, allowing for operation without power distributors and additional impedance matching.…”

Section: Ncd Depositionmentioning

confidence: 99%

Nano crystalline diamond MicroWave Chemical Vapor Deposition growth on three dimension structured silicon substrates at low temperature

Antonin

Schoeppner

Gabureac

et al. 2018

Diamond and Related Materials

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Nano crystalline diamond (NCD) films grown at a temperature below 400 °C can open new applications on temperature sensitive substrates such as polymers or low-melting point alloys. One requirement for the applicative use of NCD is the ability of depositing on structured substrate showing high aspect ratio. This work presents a study of the 3D conformity NCD deposition at low temperature (350°C) and low pressure (30 Pa). Silicon wafers have been structured using a mask-less DRIE process and seeded with nano-diamond particles. The NCD films were grown on these 3D patterned Si substrate with various trench geometries to provide means of determining the limiting geometries of this technique. By measuring the step coverage with changing trench width, a threshold for conformal NCD growth can be determined. The NCD films at the bottom of the 100 µm deep trenches were continuous down to an aspect ratio of 1:7.

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“…[3][4][5] Deposition of diamond by means of chemical vapor deposition technologies (CVD) on blank or coated silicon wafers is widely used, [3,4,6,7] whereas the low-temperature deposition of diamond films at temperatures <400 °C is challenging. [8][9][10] In previous work, also diamond-based pressure sensors were discussed, using either a diamond diaphragm in rigid diamond [11,12] or thin layers of diamond on glass. [13,14] All making use of the piezoresistive effects in doped diamond films.…”

Section: Introductionmentioning

confidence: 99%

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

Bähr

Käpplinger

Pobedinskas

et al. 2022

Physica Status Solidi (a)

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The rear side of a pressure sensor diaphragm is prepared with an additional diamond layer as protective coating against harsh media. The preparation sequence for the diamond coating is developed as a simple backend process, combining only two additional steps in the standard process. These are the local seeding of nanodiamond layer and the low‐temperature diamond growth at <300 °C in a linear antenna microwave plasma‐enhanced chemical vapor deposition reactor, where only at the nanodiamond seeded sites, a high‐quality diamond film was synthesized. The seeding resolution in the setup used was limited to ≈80 μm, but can be further reduced. In an industry‐typical assembly sequence the diamond coated pressure sensor devices are further equipped with a support wafer and mounted to a TO‐8 socket. Tests of such sensor systems indicate that the diamond layer does not hamper the stability of the device. This proofed method of postprocessing an only‐local and low‐temperature synthesis of a diamond layer on the wafer‐level opens‐ up possibilities for many other applications, since this approach is scalable and in general cost effective.

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Nanocrystalline diamond films grown at very low substrate temperature using a distributed antenna array microwave process: Towards polymeric substrate coating

Cited by 21 publications

References 32 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Nano crystalline diamond MicroWave Chemical Vapor Deposition growth on three dimension structured silicon substrates at low temperature

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

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Nanocrystalline diamond films grown at very low substrate temperature using a distributed antenna array microwave process: Towards polymeric substrate coating

Cited by 21 publications

References 32 publications

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO3 Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Nano crystalline diamond MicroWave Chemical Vapor Deposition growth on three dimension structured silicon substrates at low temperature

Pressure Sensor Devices Featuring a Chemical Passivation Made of a Locally Synthesized Diamond Layer

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Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices

Study of Low Temperature Deposition of Nanocrystalline Diamond Films on ZnO/LiNbO₃ Layered Structures Suitable for Waveguiding Layer Acoustic Wave Devices