2019
DOI: 10.1088/1755-1315/337/1/012087
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Nanocomposite antifriction molybdenum disulfide (filler) – silicon oxide (matrix) coatings

Abstract: It was demonstrated experimentally that the spatial separation of two processes of chemical vapor deposition, one of which provides synthesis of filler (MoS2) nanoparticles and the other yields the matrix (SiO2) of the nanocomposite coating, performed in a common reactor, enables an independent control over two process rates and makes it possible to widely vary the composition of the films deposited in this way. The deposition was performed in a double-zone vertical tubular quartz reactor. Molybdenum disulfide… Show more

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