Nanocasting synthesis of mesoporous CeO2 particle abrasives from mesoporous SiO2 hard templates for enhanced chemical mechanical polishing performance

Chen, Yang; Xia, Yifan; Wang, Chao; Pan, Jie; Wang, Tianyu; Chen, Ailian

doi:10.1016/j.ceramint.2024.10.236

Ceramics International

2024

DOI: 10.1016/j.ceramint.2024.10.236

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Nanocasting synthesis of mesoporous CeO2 particle abrasives from mesoporous SiO2 hard templates for enhanced chemical mechanical polishing performance

Yang Chen,

Yifan Xia,

Chao Wang

et al.

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Nanocasting synthesis of mesoporous CeO2 particle abrasives from mesoporous SiO2 hard templates for enhanced chemical mechanical polishing performance

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References 70 publications

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