Nano-structured WO3 layers sensitized with ALD Pt for quick detection of H2S

Takács, Máté; Dücső, Csaba; Pap, Andrea Edit

doi:10.1007/s10854-017-7642-7

Cited by 2 publications

(1 citation statement)

References 33 publications

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“…The flexibility of this approach can be suggested by using various MOX gas-sensitive layers, using different technology methods-thin-film (vacuum) and thick-film (atmosphere pressure). For thin-film MOX gas-sensitive layers, thicknesses starting from 0.1 µm up to 10 µm [29] are typical, which can be obtained by various methods of vacuum deposition-PLD [30], DC [31], or RF [32] magnetron sputtering, ALD [33], LPCVD [34], but in the main parts of experiments using MOX layers thicknesses of several micrometers obtained by magnetron sputtering [35]. For thick-film technology, thicknesses from 5 µm up to 50 µm [36] are typically obtained through the use of several processes-screen printing [37], drop coating [38], spin coating [39], spray pyrolysis deposition [40], and inkjet printing [41].…”

Section: Discussionmentioning

confidence: 99%

Combination of Ceramic Laser Micromachining and Printed Technology as a Way for Rapid Prototyping Semiconductor Gas Sensors

et al. 2021

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The work describes a fast and flexible micro/nano fabrication and manufacturing method for ceramic Micro-electromechanical systems (MEMS)sensors. Rapid prototyping techniques are demonstrated for metal oxide sensor fabrication in the form of a complete MEMS device, which could be used as a compact miniaturized surface mount devices package. Ceramic MEMS were fabricated by the laser micromilling of already pre-sintered monolithic materials. It has been demonstrated that it is possible to deposit metallization and sensor films by thick-film and thin-film methods on the manufactured ceramic product. The results of functional tests of such manufactured sensors are presented, demonstrating their full suitability for gas sensing application and indicating that the obtained parameters are at a level comparable to those of industrial produced sensors. Results of design and optimization principles of applied methods for micro- and nanosystems are discussed with regard to future, wider application in semiconductor gas sensors prototyping.

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