2023
DOI: 10.1016/j.apsusc.2023.157110
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Nano-squares and regular LIPSS on YSZ coating by picosecond UV laser beam: Thin film mediated and direct texturing

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Cited by 6 publications
(1 citation statement)
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“…Many techniques have been studied to fabricate nanostructures, such as nanoholes and nanogrooves on the scale of several hundred nanometers or less, including: processing high aspect ratio nanoholes in SiO 2 substrates using femtosecond pulsed lasers [20][21][22]; fabrication of nanoholes, periodic nanostructures, and nanodot structures in metals using femto/picosecond pulsed lasers [23,24]; and drilling submicron holes in polymers using femtosecond pulsed lasers at extreme ultraviolet (XUV) wavelengths [25]. There are many reports on new nanostructure-processing methods and patterning that exceed the diffraction limit of laser light; however, to our knowledge, there have been no sufficient studies on polycrystalline zirconia for nanoholes, except for the formation of nanogrooves [26][27][28]. Therefore, in our previous study, we proposed a new method to fabricate nanoscale pores in YSZ.…”
Section: Introductionmentioning
confidence: 99%
“…Many techniques have been studied to fabricate nanostructures, such as nanoholes and nanogrooves on the scale of several hundred nanometers or less, including: processing high aspect ratio nanoholes in SiO 2 substrates using femtosecond pulsed lasers [20][21][22]; fabrication of nanoholes, periodic nanostructures, and nanodot structures in metals using femto/picosecond pulsed lasers [23,24]; and drilling submicron holes in polymers using femtosecond pulsed lasers at extreme ultraviolet (XUV) wavelengths [25]. There are many reports on new nanostructure-processing methods and patterning that exceed the diffraction limit of laser light; however, to our knowledge, there have been no sufficient studies on polycrystalline zirconia for nanoholes, except for the formation of nanogrooves [26][27][28]. Therefore, in our previous study, we proposed a new method to fabricate nanoscale pores in YSZ.…”
Section: Introductionmentioning
confidence: 99%