2012
DOI: 10.1007/s12541-012-0224-y
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Nano-scale wear: A review

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Cited by 77 publications
(61 citation statements)
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“…In many tribological systems wear can occur by simultaneous actions of more than one mechanism which makes prediction of the characteristics of wear to be difficult [26]. In order to predict the amount of wear, numerous models have been proposed over the years.…”
Section: The Wear Lawmentioning
confidence: 99%
“…In many tribological systems wear can occur by simultaneous actions of more than one mechanism which makes prediction of the characteristics of wear to be difficult [26]. In order to predict the amount of wear, numerous models have been proposed over the years.…”
Section: The Wear Lawmentioning
confidence: 99%
“…Studies have found that the tip shape and geometry significantly influence its deformation behaviors at nanoscales [5][6][7]. A review of the available literature reveals that that AFM tip wear occurs through multiple wear mechanisms [8,9] such as abrasive and adhesive wear [10], low-cycle fatigue and material fracture [10], plastic deformation [11], coating failure, corrosive wear, and tribochemical wear [11], and thermochemical wear [12]. Recently, abrasive wear of AFM tips has been studied at atomic scales and it is found that the damaged surface is smoothly modified [13].…”
Section: Mechanism Of Tool Wear During Vanila Processmentioning
confidence: 99%
“…Silicon was selected as the target material since it is widely used for fabrication of micro-scale systems [20,21]. Unlike macro-scale systems in which bearings and lubrication provide excellent means to reduce friction, they cannot be employed for micro-scale systems because of limited size and surface tension effect of liquid lubricants [22][23][24][25]. Therefore, other techniques have been proposed for micro-scale systems such as thin-film solid lubrication and vapor phase lubrication (VPL) [26][27][28][29][30][31][32].…”
Section: Introductionmentioning
confidence: 99%