2008
DOI: 10.1364/oe.16.013857
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Nano-scale three dimensional surface relief features using single exposure counterpropagating multiple evanescent waves interference phenomenon

Abstract: In this paper, fabrication of nano-scale 3-D features by total internal reflection generated single exposure counter propagating multiple evanescent waves interference lithography (TIR-MEWIL) in a positive tone resist is investigated numerically. Using a four incident plane waves configuration from an 364nm wavelength illumination source, the simulated results indicate that the proposed technique shows potential in realizing periodic surface relief features with diameter as small as 0.08lambda and height-to-di… Show more

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Cited by 20 publications
(8 citation statements)
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“…Some of these limitations include patient discomfort, physician compliance, time-consuming image acquisition, and the need for trained and experienced operator. Instrumentations and optical configurations that were conceptualized from fiber optics and bulk optics have been applied widely in bio-imaging and metrology [6][7][8][9][10][11][12][13][14][15][16][17][18] .…”
Section: Introductionmentioning
confidence: 99%
“…Some of these limitations include patient discomfort, physician compliance, time-consuming image acquisition, and the need for trained and experienced operator. Instrumentations and optical configurations that were conceptualized from fiber optics and bulk optics have been applied widely in bio-imaging and metrology [6][7][8][9][10][11][12][13][14][15][16][17][18] .…”
Section: Introductionmentioning
confidence: 99%
“…In a conventional laser interference lithography the feature size achievable is limited by the diffraction limit. A method to go beyond diffraction limit is to use the near filed interference based on Surface Plasmon Resonance in metal [3][4][5][6][7].This branch of near-field optical concepts for improving patterning resolution has started developing which have been receiving considerable attention for its ability to produce high density sub-wavelength features [8,9]. In this regard, these near filed techniques have been further explored to obtain smaller feature size, higher resolution and higher exposure depths in various configurations [10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%
“…[17][18][19] Nanoscale structures are reported to be highly signicant in biosensing applications. 20,21 Recently, metal nanoparticles have become extremely signicant in biosensing research owing to the generation of surface plasmon resonances (SPR). [22][23][24][25][26] Due to the high sensitivity of SPR towards local environmental changes, it serves as a feasible candidate for biosensing and imaging applications.…”
mentioning
confidence: 99%