Nano-scale focus control technology in electron beam wafer pattern inspection system

Jie, 郭 杰 Guo; Shiguang, 李世光 Li; Yan, 赵 焱 Zhao; Mingcheng, 宗明成 Zong

doi:10.3788/co.20191202.0242

中国光学

2019

DOI: 10.3788/co.20191202.0242

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Nano-scale focus control technology in electron beam wafer pattern inspection system

郭杰 Guo Jie¹,

李世光 Li Shiguang²,

赵焱 Zhao Yan³

et al.

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Nano-scale focus control technology in electron beam wafer pattern inspection system

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