Nano-precision Polishing of CVD SiC Using MCF (Magnetic Compound Fluid) Slurry

Abstract

Article history:CVD SiC is a perfect material used for molds/dies in hot press molding of glass lens. In its fabrication process, nano-precision polishing is essential finally. For this purpose, a novel polishing method using MCF (Magnetic Compound Fluid) slurry is proposed. In this method, MCF slurry is supplied into a given gap between the workpiece and a MCF slurry carrier, and constrained within the polishing zone by magnetic forces from permanent magnet. In this paper, after an experimental rig used to actually realize the proposed method has been constructed, the fundamental polishing characteristics of CVD SiC such as the effects of process parameters including MCF slurry composition on worksurface roughness were experimentally investigated. As a result, nano-precision surface finish of CVD SiC was successfully attained with MCF slurry and the optimum process parameters for obtaining the smoothest work-surface were determined.

Novel high efficiency deterministic polishing method using magnetorheological elastomer

“…However, it also undertakes the risk of shear thinning in high efficiency mode. Wu [13] and Wang [14] added some α-cellulose with different molecular chain lengths in the traditional MRF fluid, and then proposed a novel magnetorheological compound fluid. Cellulose in the fluid plays the role of linkage and connects the particles, provides more support for magnetic particles and then increases the bond between particles, and finally improves the strength of the polishing fluid, which will result in high efficiency, and it is well confirmed by their experimental results.…”

Nano-Precision Polishing of Oxygen-Free Copper Using MCF (Magnetic Compound Fluid) Slurry

“…The MCF is produced by mixing the magnetic fluid (MF) containing nanometer size magnetite particles and magnetorhelolgical fluid (MRF) containing micron size carbonyl iron powder (CIP) in the same base solvent, and exhibits higher magnetic pressure and apparent viscosity and a more stable distribution of particles under a magnetic field, while maintaining a fluid-like behavior [4]. Further mixing abrasive particles and α-cellulose into the MCF yields the MCF slurry [5][6]. The MCF slurry has been successfully used for polishing stainless steel and acrylic resin flat surfaces with nano-precision and scratch-free work-surfaces under a static and/or dynamic magnetic field [7][8].…”

Fatigue Strength Check of Flexspline with Inner and Outer Gear Ring of the Micro Harmonic Drive

“…The flexspline is a key component in harmonic drive,bearing the alternating elastic deformation in the work process, so the research of loading capacity and the check of fatigue strength of flexspline is very important. Adapting the planetary wave generator, compared with the traditional rigid transmission,the micro harmonic drive has the more advantages [1,2,3,4,5], the transmission ratio is calculated through multiplying the planetary drive transmission ratio and the harmonic drive transmission ratio. Therefore, compared with the traditional micro gear drive,the micro harmonic drive has a larger transmission ratio, higher precision, higher transmission efficiency, smaller transmission inertia,simpler structure, smaller volume,lighter weight and a larger meshing tooth number, and the driving system is coaxial.…”