Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system

Kim, Kyu Gyeom; Kim, Jae Hee; Min, Jong Hwan; Kim, Kyong Woo; Kwon, Young Hoo; Min, Jin Young; Yoon, Kwon Ha

doi:10.1117/12.626316

Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II 2005

DOI: 10.1117/12.626316

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Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system

Kyu Gyeom Kim

Jae Hee Kim

Jong Hwan Min

et al.

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Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system

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