During nanofabrication, the processing of different crystal faces along the surface of a workpiece varies because of size effects. The burr height and subsurface damage during nanogrinding of different crystal orientations in monocrystalline nickel are simulated by molecular dynamics in this study. The burr height and depth of the subsurface deformation layer are calculated quantitatively by atomic displacement, common neighbor analysis and dislocation analysis techniques. Among the directions considered in this paper, the burr height is the smallest when grinding in the (110)[110] direction, and the depth of the subsurface deformation layer is small when grinding along the (111) plane. This study demonstrates the effect of different slip paths on burr height and provides a reference for the actual processing of face-centered cubic crystals.