Nano-CT imaging of electrically stressed power device metallization

Mueller, Dominik; Fella, Christian; Altmann, Frank; Graetz, Jonas; Balles, Andreas; Ring, Matt; Gambino, Jeff

doi:10.1109/ipfa53173.2021.9617279

2021 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) 2021

DOI: 10.1109/ipfa53173.2021.9617279

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Nano-CT imaging of electrically stressed power device metallization

Dominik Mueller¹,

Christian Fella

Frank Altmann

et al.

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Nano-CT imaging of electrically stressed power device metallization

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References 8 publications

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