Nano-CNC Machining of Sub-THz Vacuum Electron Devices

Gamzina, Diana; Himes, Logan; Barchfeld, Robert; Zheng, Yuan; Popovic, Branko; Paoloni, Claudio; Choi, Eun‐Mi; Luhmann, Neville C.

doi:10.1109/ted.2016.2594027

Cited by 94 publications

(21 citation statements)

References 33 publications

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“…As the working frequency goes up to the Y-band, this processing error cannot satisfy the requirement of our new device. And hence, we try the UV-LIGA technique to fabricate the planar SWSs 21 . Since the electromagnetic losses increase dramatically at higher frequencies, the copper material is selected for its low millimeter wave loss and high thermal conductivity.…”

Section: Fabrication Of the Bwomentioning

confidence: 99%

Continuous-wave Y-band planar BWO with wide tunable bandwidth

Wang

et al. 2018

Sci Rep

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A high performance continuous-wave (CW) backward wave oscillator (BWO) with planar slow wave structure (SWS) and sheet electron beam in Y-band is presented in this paper. The mode selection is discussed by studying the dispersion curve of SWSs, distributions of the electric field, and particle-in-cell simulation results, showing that the designed BWO operates in the fundamental mode TM11. The planar SWSs are fabricated by using the UV-LIGA technology with the processing error less than 0.003 mm. The electron gun can provide the 2.5 mm × 0.14 mm sheet electron beam with maximum current density of 57 A/cm2 at the CW mode. Experimental results show that the developed BWO can operate in the fundamental mode TM11 and generate the state-of-art output power of 182 mW at the frequency of 0.3426 THz with a large frequency tuning range from 0.318 THz to 0.359 THz.

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Section: Fabrication Of the Bwomentioning

confidence: 99%

Continuous-wave Y-band planar BWO with wide tunable bandwidth

Wang

et al. 2018

Sci Rep

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“…The DCW circuit is in fabrication phase by using the NN1000 DCG HSC nano-CNC milling machine developed by Digital Technology Laboratory, subsidiary of DMG -MORI, in Davis CA as a prototype machine for advancement of nano-precision manufacturing capabilities [9,10]. The DCW circuit is manufactured employing CNC milling technology to create the micro pillars as is shown in Fig.9 and the average surface roughness (Ra) across pillar surfaces is about 124 nm after copper bright dip cleaning.…”

Section: A Dcw Circuitmentioning

confidence: 99%

Fabrication of a 0.346-THz BWO for Plasma Diagnostics

Feng¹,

Tang²,

Gamzina

et al. 2018

IEEE Trans. Electron Devices

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Nuclear fusion energy is perhaps one of the most demanding challenges the scientific community is facing. Unfortunately, the plasma is affected by micro-turbulence, which is still not fully understood, but which can degrade plasma confinement. The 0.346 THz backward wave oscillator is the enabling device for a high-k plasma collective scattering diagnostic that will provide unprecedented insight on turbulence thereby contributing to the realization of fully operational fusion reactors. This paper describes the final fabrication phase of the 0.346 THz backward wave oscillator for the collective scattering diagnostic jointly performed in an international project, involving three leading institutions in vacuum electronics. The advancements in technology will open the route to new families of THz vacuum electron devices to enable new THz applications and provide industry with new advanced processes.

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“…A machining tolerance with a few microns, a surface roughness with hundreds of nanometers and a small assembling error are typically required in the fabrication of the HFS in a terahertz band SB-TWT. Considerable efforts have been made for the fabrication of the micro-structures in a terahertz vacuum electron device, such as the nano-computer numerical control (CNC) milling techniques [3], [15], [24]- [25], LIGA (German acronym for lithography, electroplating, and molding) process techniques [13], [26], deep-reactive ion etching (DRIE) techniques [26], wire cutting techniques [10], [27], and the 3D-printed mold electroforming [28].…”

Section: Introductionmentioning

confidence: 99%

Design, Fabrication, and Cold Test of a High Frequency System for an H-Band Sheet Beam Travelling Wave Tube

Shu

Deng

Xie

et al. 2020

IEEE Trans. THz Sci. Technol.

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Shenzhen University (2018046).Abstract-The design, fabrication and cold test of a high frequency system (HFS) for an H-band (220-325GHz) sheet beam travelling wave tube (SB-TWT) is presented in this paper. The HFS was composed of a 90-period double-staggered grating waveguide and a pair of identical L-shaped couplers with Bragg reflectors and matching steps. The HFS was manufactured by Nano-CNC machining and its electromagnetic properties were measured by using a vector network analyzer. The measured S-parameters were in good agreement with the simulated ones, which predicted a 3 dB bandwidth of ~47.0 GHz. The maximum value of the measured transmission coefficient S21 was -4.9 dB and the in-band port reflection S11 was around -15.0 dB. Based on the cold testing-based HFS, simulations of the beam wave interaction predicted a stable output power of over 55.1 W in the frequency range of 230-280 GHz. In addition, the instabilities of the beam wave interaction were investigated in the simulation.Index Terms-high frequency system, interaction instability, terahertz wave amplification, sheet beam travelling wave tubes.

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Nano-CNC Machining of Sub-THz Vacuum Electron Devices

Cited by 94 publications

References 33 publications

Continuous-wave Y-band planar BWO with wide tunable bandwidth

Continuous-wave Y-band planar BWO with wide tunable bandwidth

Fabrication of a 0.346-THz BWO for Plasma Diagnostics

Design, Fabrication, and Cold Test of a High Frequency System for an H-Band Sheet Beam Travelling Wave Tube

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