In this paper, we propose an n‐type vertical transition bound‐to‐continuum Ge/SiGe quantum cascade structure utilizing electronic quantum wells in the L and Γ valleys of the Ge layers. The optical transition levels are located in the quantum wells in the L valley. The Γ‐L intervalley scattering is used to depopulate the lower level and inject the electrons into the upper level. We also show that high quality Si1–yGey pseudosubstrate is obtained by thermal annealing of Si1–xGex/Ge/Si structure. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)