The formation mechanism of N-H-related defects in GaAsN grown by chemical beam epitaxy (CBE) is studied on the basis of the isotope effects on the local vibration modes (LVMs) originating from N-H. When deuterated monomethylhydrazine (MMHy) is used as the N source, LVM signals from the nitrogen-deuterium bond (N-D) are obtained. However, there are still N-H peaks in the IR absorption spectra, which have intensities similar to those of N-D peaks. When the film is grown with deuterated triethylgallium (TEGa), there are no N-D peaks. The peak intensity at 2952 cm %1 increases with increasing tris(dimethylamino)arsenic (TDMAAs) flow rate, and that at 3098 cm %1 is almost constant regardless of the flow rate. These results indicate that H atoms in the N-H-related defects originate from H directly bonded to N in MMHy and CH 3 in MMHy and/or H in TDMAAs, not from TEGa.