“…Oxynitride glasses, glass ceramics, and coatings containing all three elements are slightly more common owing primarily to the improved thermal, mechanical, and chemical properties afforded by the addition of nitrogen to oxide glasses . However, the addition of a fourth element—hydrogen (eg a‐SiONH) via various polymer‐derived, thermal, and plasma‐enhanced chemical vapor deposition (PECVD) methods leads to a much more diverse array of technologically important materials and applications. Thin films of a‐SiO x , a‐SiNH, and a‐SiNOH are also extensively utilized in the semiconductor industry for a wide variety of electronic, optoelectronic, photovoltaic, thermal, mechanical, micro‐electromechanical, and biological applications to create surface passivation, solid‐state electrolytes, anti‐reflection coatings, membranes, gate dielectrics, etch stops, diffusion barriers, moisture sensors, micromechanical cantilevers, and biomineralization layers .…”