Multivariable feedback control in stage synchronization

Lambregts, Cees J.H.; Heertjes, Marcel; Veek, Bartel J. van der

doi:10.1109/acc.2015.7171980

Cited by 4 publications

(2 citation statements)

References 21 publications

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“…Various research examples have demonstrated improved synchronization by adding coupling controllers to MAMS, such as the cross-coupled strategy [11], and the masterslave strategy [12], etc.. When applied to a MAMS, the transmission delay between axes [13] had to be considered, and the intensity of online computation increases exponentially together with increasing of the number of axes [14,15]. In order to overcome the above disadvantages, an additional coupling synchronous controller is necessary, along with advanced motion control strategies to reduce the synchronous error through model compensation and disturbances rejection.…”

Section: Introductionmentioning

confidence: 99%

Learning Synchronous Control Based on Intelligent Methods for Ultra-Precision Stage Systems

Zhou,

Qi,

et al. 2024

IEEE Access

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With the increasing demands on equipment accuracy, synchronous performance becomes more and more significant for ultra-precision systems. In order to achieve nanometer-level accuracy and millisecond synchronization in practice, a learning synchronous control (LSC) strategy has been proposed in this research. Specifically, in our research, the LSC strategy includes Genetic Algorithm (GA) tuning method and Back Propagation (BP) neural network synchronous controller. Herein, GA tuning method has been designed to optimize the parameters of controllers for each axis offline. In order to enhance real-time information exchange between axes, a BP synchronous controller has been designed to enhance the coupling between axes and compensate for dynamic disturbances. Then the convergence criteria and stability analysis of the method have been presented. The proposed LSC was simulated and experimented on an ultra-precision stage system, and the experimental results demonstrate that the proposed LSC can simultaneously possess nanometer-level tracking/synchronous accuracy and millisecond synchronization. Furthermore, compared to the conventional PID, the proposed LSC has higher synchronization performance with MA of 0.642nm, MSD of 3.98nm, and a settling time of 10ms. The LSC strategy provides an effective control technology with good potential in industrial applications.

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Section: Introductionmentioning

confidence: 99%

Learning Synchronous Control Based on Intelligent Methods for Ultra-Precision Stage Systems

Zhou,

Qi,

et al. 2024

IEEE Access

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“…The present paper extends this to a more general setting containing more detailed proofs and explanation, and, in addition, C3, C4. Research related to results presented here includes Barton and Alleyne (2007), Temizer (2012), Lambregts, Heertjes, andvan der Veek (2015), Navarrete et al (2015) and Sakata and Fujimoto (2009). The framework guarantees robust stability under uncertainty in the system dynamics, finite accuracy of the plant model and neglected subsystem interaction components.…”

Section: Introductionmentioning

confidence: 99%

Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion

Evers

Wal

Oomen

2019

Control Engineering Practice

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DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:

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Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

Song

Yang

Shen

et al. 2022

IEEE Trans. Ind. Electron.

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Multivariable feedback control in stage synchronization

Cited by 4 publications

References 21 publications

Learning Synchronous Control Based on Intelligent Methods for Ultra-Precision Stage Systems

Learning Synchronous Control Based on Intelligent Methods for Ultra-Precision Stage Systems

Beyond decentralized wafer/reticle stage control design: A double-Youla approach for enhancing synchronized motion

Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

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