1998
DOI: 10.1063/1.367423
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Multitube surface-wave discharges for increased gas throughput at atmospheric pressure

Abstract: Large diameter (>10 mm) microwave discharges at atmospheric pressure are often constricted transversely and, when large gas flow rates are used, unstable as far as microwave power coupling is concerned. A group of small bore tubes can be used instead to provide the same gas throughput and ensure a higher probability of interaction of molecules to be processed with the carrier gas. The solution presented provides equal power sharing in these small diameter plasma columns and it employs preferably a singl… Show more

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Cited by 48 publications
(42 citation statements)
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“…This point is supported by the work of Jeong et al [15], who performed axially resolved optical emission and ultraviolet (UV) absorption measurements of O 2 OES gives direct access only to excited particles, and conclusions on the atomic ground state density (exceeding that of excited states by several orders of magnitude) require rather complex models of approximative character. Furthermore, OES only provides line-of-sight integrated information, unless tomographic methods (e.g.…”
Section: Introductionmentioning
confidence: 70%
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“…This point is supported by the work of Jeong et al [15], who performed axially resolved optical emission and ultraviolet (UV) absorption measurements of O 2 OES gives direct access only to excited particles, and conclusions on the atomic ground state density (exceeding that of excited states by several orders of magnitude) require rather complex models of approximative character. Furthermore, OES only provides line-of-sight integrated information, unless tomographic methods (e.g.…”
Section: Introductionmentioning
confidence: 70%
“…With these data, we derived the two-photon excitation cross-section ratio σ (2) (Xe)/ J σ (2) J →J (O) = 1.9 from the measured calibration factor, where J is the total angular momentum quantum number of the upper fine structure levels; we estimate the overall uncertainty to be ∼20%.…”
Section: Two-photon Excitation Cross Sectionsmentioning
confidence: 99%
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“…In the last decades, field applicators for such sources were developed, investigated and implemented in practice (see e.g. [1,2,3]). In the present investigations we used a surfaguide-type plasma source, based on WR 430 standard waveguide.…”
Section: Introductionmentioning
confidence: 99%