Multiscale Physics-Informed Neural Network Framework to Capture Stochastic Thin-Film Deposition
Donovan Chaffart,
Yue Yuan,
Luis A. Ricardez-Sandoval
Abstract:This work outlines the development of a multiscale Physics-Informed Neural Network (PINN) approach to capture the full multiscale thin-film growth process within a stagnation point flow vapor deposition chamber. These PINNs were trained using a multiscale model consisting of a macroscale mass transport partial differential equation (PDE) that captures the gaseous precursor species movement coupled with a microscale stochastic PDE (SPDE) to capture the film surface growth. Both the macroscale and microscale dif… Show more
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