Multiscale modeling and experimental analysis of chemical vapor deposited aluminum films: Linking reactor operating conditions with roughness evolution

Aviziotis, Ioannis G.; Cheimarios, Nikolaos; Duguet, Thomas; Vahlas, Constantin; Boudouvis, Andreas G.

doi:10.1016/j.ces.2016.08.039

Cited by 22 publications

(19 citation statements)

References 70 publications

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“…TiO 2 films are deposited in a vertical, cylindrical, stagnant flow cold wall stainless steel MOCVD reactor, which has been described in detail elsewhere [37]. In each experiment, P light-doped (1-20 Ω.cm) and As high-doped (0.001-0.005 Ω.cm) n-type Si (100) wafers, and fused silica windows (Neyco) are placed on the heated sample holder.…”

Section: Methodsmentioning

confidence: 99%

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

Miquelot

Debieu

Rouessac

et al. 2019

Applied Surface Science

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Green H 2 production by solar water splitting relies entirely on the intrinsic properties of the photocatalyst. In this study the impact of these intrinsic properties on the photocatalytic activity of anatase TiO 2 , the quintessential component of state of the art photocatalytic systems was explored at the nanoscale. The exploration involved a holistic microstructural and optical characterization of fully crystallized anatase thin films synthetized by metalorganic chemical vapor deposition. A combination of electron microscopy, spectroscopic ellipsometry, and infrared spectroscopy revealed that when the deposition temperature increased, the morphology evolved from dense to porous and columnar nanostructures. Interestingly, the columns with a complex, tree-like nanostructure photogenerated 18 times more H 2 than the densest sample. This result shows that the beneficial effect of the morphological nano-complexification and crystallographic diversification of the exchange facets on the photocatalytic performance outweighs the detrimental aspects inherent to this evolution, namely the drop of the charge carrier transport and the increase of residual stress. 1. Introduction Research on renewable energy is vital in the current context of global warming and societies that rely on high energy consumption. Hydrogen is a promising source of renewable energy and catalyzed solar water splitting (SWS) is a carbon-free method to produce it. Numerous materials have been tested to catalyze this reaction [1,2]. Among them, TiO 2-because it is non-toxic, chemically stable, abundant and affordable has been widely investigated as a photocatalytic material since Fujishima and Honda's seminal work [3-8]. Despite its high energy band-gap (3.2 eV), crystalline anatase TiO 2 shows attractive opto-electronic properties. It is an indirect semiconductor with a long exciton lifetime [9,10]; it has a conduction band minimum energy level below the redox potential of H+/H 2 (0 V vs. NHE) and a valence band maximum energy level above the redox potential of O 2 /H 2 O (+1.23 V vs. NHE) [11,12].

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Section: Methodsmentioning

confidence: 99%

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

Miquelot

Debieu

Rouessac

et al. 2019

Applied Surface Science

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“…elsewhere! [25].!The!precursor!is!99.9%!pure!tris(2,2,6,6-tetramethyl-3,! 5-heptanedionato)!cobalt!(III)!…”

Section: Film!deposition!mentioning

confidence: 99%

Morphological, structural, optical, and electrical study of nanostructured thin films: Charge transport mechanism of p-type Co3O4

Miquelot

Despotopoulou

Vahlas

et al. 2020

Materials Chemistry and Physics

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“…It is attributed to the rough microstructures of the two initial layers, reported in Refs. for Al and Fe films, respectively, further perturbed by the extended interdiffusion during annealing. In that lamella, no pure Al regions are observed, confirming that diffusion is effective across the whole stack.…”

Section: Resultsmentioning

confidence: 99%

“…In this paper, we describe an innovative route for the processing of Al 13 Fe 4 films by sequential CVD of the two metals followed by in situ thermal annealing to stimulate reactive diffusion. This work is based on our recent investigations of the kinetics and the transport phenomena of the CVD of unary Al and Fe . We characterize the structure and composition of the films, we report preliminary results on the semi‐hydrogenation of acetylene with the obtained Al‐Fe films as catalysts and we propose correlations between the catalytic behavior and the characteristics of the films.…”

Section: Introductionmentioning

confidence: 99%

Chemical Vapor Deposition of Al₁₃Fe₄ Highly Selective Catalytic Films for the Semi‐Hydrogenation of Acetylene

Aviziotis

Duguet

Soussi

et al. 2017

Physica Status Solidi (a)

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Catalytic properties of coatings containing the Al13Fe4 intermetallic phase are tested in the reaction of semi‐hydrogenation of acetylene. The selectivity to ethylene is found as high as 74% close to the reported values for pure, unsupported Al13Fe4. The initial conversion of acetylene to ethylene is 84% and rapidly drops due to the catalytic formation of carbon‐based by‐products on secondary Al‐Fe phases. Coatings are processed through sequential chemical vapor deposition (CVD) of aluminum (5 Torr, 180 °C) and iron (40 Torr, 140 °C) layers, followed by in situ annealing for 60 min at 575 °C. Deposition proceeds at high growth rate, resulting in 15 μm thick films. After annealing, coatings are composed of the Al13Fe4 phase, co‐existing with minor secondary Al‐Fe intermetallic phases. Overall, it is shown that films containing complex Al‐Fe intermetallic phases can be processed by CVD, opening new routes to the engineering of pure, supported Al13Fe4 catalysts on 3D or porous supports.

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Multiscale modeling and experimental analysis of chemical vapor deposited aluminum films: Linking reactor operating conditions with roughness evolution

Abstract: Direct comparison to experimental data with good agreement. Effective sticking coefficient including chemical information. Prediction of electrical resistivity through roughness simulations.

Cited by 22 publications

References 70 publications

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

Morphological, structural, optical, and electrical study of nanostructured thin films: Charge transport mechanism of p-type Co3O4

Chemical Vapor Deposition of Al₁₃Fe₄ Highly Selective Catalytic Films for the Semi‐Hydrogenation of Acetylene

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Multiscale modeling and experimental analysis of chemical vapor deposited aluminum films: Linking reactor operating conditions with roughness evolution

Abstract: Direct comparison to experimental data with good agreement. Effective sticking coefficient including chemical information. Prediction of electrical resistivity through roughness simulations.

Cited by 22 publications

References 70 publications

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

Morphological, structural, optical, and electrical study of nanostructured thin films: Charge transport mechanism of p-type Co3O4

Chemical Vapor Deposition of Al13Fe4 Highly Selective Catalytic Films for the Semi‐Hydrogenation of Acetylene

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Chemical Vapor Deposition of Al₁₃Fe₄ Highly Selective Catalytic Films for the Semi‐Hydrogenation of Acetylene