2023
DOI: 10.1021/acssensors.3c01244
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Multiplexed Gas Sensor: Fabrication Strategies, Recent Progress, and Challenges

Gulshan Verma,
Anisha Gokarna,
Hind Kadiri
et al.

Abstract: Due to miscellaneous toxic gases in the vicinity, there is a burgeoning need for advancement in the existing gas sensing technology not only for the survival of mankind but also for the industries based in various fields such as beverage, forestry, health care, environmental monitoring, agriculture, and military security. A gas sensor must be highly selective toward a specific gas in order to avoid incorrect signals while responding to nontarget gases. This may lead to complex scenarios depicting sensor defect… Show more

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Cited by 10 publications
(7 citation statements)
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“…Photolithography stands as a foundational technique within the realm of microfabrication, widely acknowledged for its capacity to produce intricate patterns on various substrates. The process relies on light-sensitive materials known as photoresists, which undergo chemical transformations upon exposure to specific wavelengths of light . Through a combination of selective exposure and subsequent development steps, microstructures possessing finely detailed features can be meticulously etched onto the substrate.…”
Section: Micro and Nanomanufacturing Techniquesmentioning
confidence: 99%
See 1 more Smart Citation
“…Photolithography stands as a foundational technique within the realm of microfabrication, widely acknowledged for its capacity to produce intricate patterns on various substrates. The process relies on light-sensitive materials known as photoresists, which undergo chemical transformations upon exposure to specific wavelengths of light . Through a combination of selective exposure and subsequent development steps, microstructures possessing finely detailed features can be meticulously etched onto the substrate.…”
Section: Micro and Nanomanufacturing Techniquesmentioning
confidence: 99%
“…The process relies on lightsensitive materials known as photoresists, which undergo chemical transformations upon exposure to specific wavelengths of light. 13 Through a combination of selective exposure and subsequent development steps, microstructures possessing finely detailed features can be meticulously etched onto the substrate.…”
Section: Lithography-based Techniquesmentioning
confidence: 99%
“…4 Materials for detecting harmful gases have seen numerous advances during the past few decades, notably carbonaceous materials 5 and semiconductor metal oxides. 6 Still, a majority of the aforementioned compounds need high temperatures while operating and have energy consumption. As a result, scientists have examined low-temperature gas sensors that can detect NH 3 , such as those that use MoS 2 , 7 graphene, 8 and other low-dimensional noble-metal doping nanocomposites.…”
mentioning
confidence: 99%
“…Currently, chemical sensors operating at ambient temperature have become an entirely novel sensing device with reduced device power requirements, improved safety, and wearables projected to replace the traditional sensors in the coming years . Materials for detecting harmful gases have seen numerous advances during the past few decades, notably carbonaceous materials and semiconductor metal oxides . Still, a majority of the aforementioned compounds need high temperatures while operating and have energy consumption.…”
mentioning
confidence: 99%
“…In the context of the growing low-carbon economy (LCE), hydrogen (H 2 ) energy has gained widespread usage in various applications, such as hydrogen fuel cell vehicles and hydrogen chemical industry. However, hydrogen exhibits notable attributes, including rapid diffusion (0.61 cm 2 /s), low ignition energy (∼0.2 mJ), and a wide flammability range in air (4–75 v/v%). These attributes lead to safety risks in H 2 production, transportation, and utilization. To ensure the safe utilization of H 2 , there is a high demand for highly sensitive H 2 sensors with excellent long-term stability. , Depending on the underlying hydrogen sensing mechanisms, H 2 sensors can be categorized into different types, such as mechanical or electrochemical change-based, resistance-based, thermal-based, acoustically assisted, catalytic activity-based, and optically assisted sensors. Among these, surface acoustic wave (SAW) hydrogen sensors have emerged as a promising technology due to their remarkable advantages in terms of response speed, sensitivity, and low-power consumption. , …”
mentioning
confidence: 99%