Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer With Dynamic Control Provision of Effective Cavity Height

Munirathinam, Pavithra; Nazemi, Haleh; Nathani, Muhammad Umair; Raj, Gian Carlo Antony; Elnemr, Youssef Ezzat; Buchanan, Douglas A.; Emadi, A. Arezoo

doi:10.1109/jsen.2023.3344780

IEEE Sensors J.

2024

DOI: 10.1109/jsen.2023.3344780

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Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer With Dynamic Control Provision of Effective Cavity Height

Pavithra Munirathinam,

Haleh Nazemi,

Muhammad Umair Nathani

et al.

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Multiple Moving Membrane Capacitive Micromachined Ultrasonic Transducer With Dynamic Control Provision of Effective Cavity Height

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References 24 publications

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