2018
DOI: 10.1088/1361-6439/aaaf78
|View full text |Cite
|
Sign up to set email alerts
|

Multiphysics modelling and experimental validation of an air-coupled array of PMUTs with residual stresses

Abstract: In this paper a complete multiphysics modelling via the finite element method (FEM) of an air-coupled array of piezoelectric micromachined ultrasonic transducers (PMUT) and its experimental validation are presented. Two numerical models are described for the single transducer, axisymmetric and 3D, with the following features: the presence of fabrication induced residual stresses, which determine a non-linear initial deformed configuration of the diaphragm and a substantial fundamental mode frequency shift; the… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

1
19
0

Year Published

2019
2019
2023
2023

Publication Types

Select...
4
1
1

Relationship

0
6

Authors

Journals

citations
Cited by 20 publications
(21 citation statements)
references
References 14 publications
1
19
0
Order By: Relevance
“…Figure 10 shows an example of result comparison. Massimino et al [26] also obtained satisfactory results when comparing his 3D model and 2D…”
Section: Meshing In Acoustic Analysismentioning
confidence: 73%
See 4 more Smart Citations
“…Figure 10 shows an example of result comparison. Massimino et al [26] also obtained satisfactory results when comparing his 3D model and 2D…”
Section: Meshing In Acoustic Analysismentioning
confidence: 73%
“…If FLUID129/130 is set on non-circular/spherical exterior, some waves will be reflected when it hits the acoustic boundary. The ABC wave absorption method is viable, and this is confirmed from simulation done be Massimino et al [26]. He used FLUID130 as the wave absorption boundary for his simulation which has a quarter hemisphere acoustic domain and obtained satisfactory sound pressure level (SPL) results (Appendix A).…”
Section: Absorbing Boundary Condition (Abc)mentioning
confidence: 75%
See 3 more Smart Citations