Multiparametric measurements of epitaxial semiconductor structures with the use of one-dimensional microwave photonic crystals

Усанов, Д. А.; Никитов, С. А.; Skripal, A. V.; Ponomarev, D. V.; Latysheva, E. V.

doi:10.1134/s1064226916010125

Cited by 4 publications

(1 citation statement)

References 2 publications

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“…In [47], it is proposed to implement a method for simultaneous measurement of the substrate thickness of a semiconductor structure, the thickness and conductivity of a heavily doped epitaxial layer, the mobility of free charge carriers in this layer using a one-dimensional microwave photonic crystal. The one-dimensional waveguide photonic crystal consisted of 11 layers, forming a structure of periodically alternating elements, each of which included two layers, was considered.…”

Section: Emerging Waveguide Technology 40mentioning

confidence: 99%

Photonic Crystal Waveguides

Усанов¹,

Skripal²

2018

Emerging Waveguide Technology

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The original results of theoretical and experimental studies and the properties of microwave one-dimensional waveguide photonic crystals have been generalized. Methods for describing the electrodynamic characteristics of photonic crystals and their relationship with the parameters of periodic structures filling the waveguides have been presented. The results of an investigation on the characteristics of microwave waveguide photonic crystals made in the form of dielectric matrices with air inclusions have been presented. The model of effective dielectric permittivity has been proposed for describing the characteristics of the investigated photonic crystals containing layers with a large number of air inclusions. New types of microwave low-dimensional waveguide photonic crystals containing periodically alternating elements that are sources of higher type waves have been described. The possibility of effective control of the amplitude-frequency characteristics of microwave photonic crystals by means of electric and magnetic fields has been analyzed. Examples of new applications of waveguide photonic crystals in the microwave range have been given: the measuring parameters of the materials and semiconductor nanostructures that play the role of the microwave photonic crystals' periodicity defect; the resonators of near-field microwave microscopes; small-sized matched loads for centimeter and millimeter wavelength ranges on the basis of microwave photonic crystals.Keywords: microwave photonic crystals, forbidden bands, defect mode, electrically controlled characteristics, measurement of micro-and nanostructures, microwave matched loads, low-dimensional photonic crystal time proposed by Keldysh [1]. Periodic semiconductor structures with predetermined parameters of layers were called semiconductor superlattices. The wide interest to the problem of their creation appeared after the article was published in 1970 by Esaki and Tsu, who proposed to make such structures by changing the doping or composition of the layers [2]. The periods in such structures had values from 5 to 20 nm. The number of layers reached several hundred.The author [3] gave the definition of photonic crystals as materials whose crystal lattice has a periodicity of the permittivity leading to the appearance of the "forbidden" frequencies range, called the photonic band gap. Yablonovich [4] and John [5] proposed to create structures with a photonic band gap, which can be considered as an optical analog of the band gap in semiconductors. In this case, the forbidden band is the frequency range in which the existence of light in the inner part of the crystal is forbidden. The type of defect or disturbance of periodicity in this instance can be different. Such structures have to be created artificially in contrast to natural crystals. In this case, the size of the basic unit element of a photonic crystal should be comparable with the light wavelength. The manufacturing of such structures involves the use of electron-beam and X-ray lithography [6].As the adva...

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Section: Emerging Waveguide Technology 40mentioning

confidence: 99%

Photonic Crystal Waveguides

Усанов¹,

Skripal²

2018

Emerging Waveguide Technology

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Application of a Microwave Coaxial Bragg Structure for the Measurement of Parameters of Insulators

Усанов

Никитов

Skripal

et al. 2020

J. Commun. Technol. Electron.

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Microwave Sensor Based on Meander-Shaped Volumetric Strip Line for Dielectric Control of Liquid Media

Ishkaev,

Nasybullin,

Farkhutdinov

et al. 2023

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The paper proposes a new type of transducer elements for means of dielectric control of liquid media operating in the long-wave region of the microwave range, based on meander-shaped volumetric strip lines. Their main difference is the increased conversion sensitivity and smaller linear dimensions in comparison with sensors based on planar transmission lines. The introduction describes the relevance of the problem being solved, raises the problem of the need to increase the size of the transducer elements in the frequency range under consideration to ensure satisfactory sensitivity, and determines the transition to bulk structures. In the main part of this section, a mathematical description of the elementary cells of a volumetric strip microwave structure is carried out, and a comparison of the sensitivity with microstrip lines with a dielectric coating that are equivalent in physical parameters is given. In the experimental part of the article, the proposed structure is tested as a transducer element in a experiment to assess the degree of water cut in oil. The result of the experimental study is the obtained sensitivity value of the developed sensor S = 3.142 deg/%, as well as an estimate of the error in measuring the oil water cut, which amounted to 0.3 %.

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Multiparametric measurements of epitaxial semiconductor structures with the use of one-dimensional microwave photonic crystals

Cited by 4 publications

References 2 publications

Photonic Crystal Waveguides

Photonic Crystal Waveguides

Application of a Microwave Coaxial Bragg Structure for the Measurement of Parameters of Insulators

Microwave Sensor Based on Meander-Shaped Volumetric Strip Line for Dielectric Control of Liquid Media

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