Abstract:In this study, the conceptual design and performance of a multimodal X-ray probe station recently installed at the 9C coherent X-ray scattering beamline of the Pohang Light Source-II are presented. The purpose of this apparatus is to measure coherent X-ray diffraction, X-ray fluorescence and electrical properties simultaneously. A miniature vacuum probe station equipped with a four-point probe was mounted on a six-axis motion hexapod. This can be used to study the structural and chemical evolution of thin film… Show more
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