2018
DOI: 10.1063/1.5019570
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Multilevel resistive switching in TiO2/Al2O3 bilayers at low temperature

Abstract: We report an approach to design a metal-insulator-metal (MIM) structure exhibiting multilevel resistive switching. Toward this end, two oxide layers (TiO2 and Al2O3) were combined to form a bilayer structure. MIM structures demonstrate stable bipolar switching relative to the resistive state determined by the bias voltage. The resistive state of such bilayer structures can be electrically tuned over seven orders of magnitude. The resistance is determined by the concentration of oxygen vacancies in the active l… Show more

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Cited by 24 publications
(13 citation statements)
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“…Adding the Al 2 O 3 layer to the TiO 2 layer allows extending the range of the nonvolatile tuning of the structural resistance to seven orders of magnitude. Thus, in Pt-BE/TiO 2 /Al 2 O 3 (10 nm)/Pt-TE bilayer structures, aluminum oxide plays the role of an active (switching) layer [15]. This statement is supported by experimental observation of the resistive switching in single-layer Pt/Al 2 O 3 /Pt structures with an R OFF /R ON ratio of about seven orders of magnitude (Figure 4).…”
Section: Resultsmentioning
confidence: 57%
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“…Adding the Al 2 O 3 layer to the TiO 2 layer allows extending the range of the nonvolatile tuning of the structural resistance to seven orders of magnitude. Thus, in Pt-BE/TiO 2 /Al 2 O 3 (10 nm)/Pt-TE bilayer structures, aluminum oxide plays the role of an active (switching) layer [15]. This statement is supported by experimental observation of the resistive switching in single-layer Pt/Al 2 O 3 /Pt structures with an R OFF /R ON ratio of about seven orders of magnitude (Figure 4).…”
Section: Resultsmentioning
confidence: 57%
“…Compared to Pt-BE/TiO 2 /Al 2 O 3 /Pt-TE bilayer structures, for which the degree of power dependence of the corresponding part of I-V curves for HRS differs from those for LRS, Pt-BE/TiO 2 /Al 2 O 3 /Al-TE bilayer structures exhibit the same degree of power dependence for both HRS and LRS (Figure 5c). Previous experimental evidence [15,19] suggests the dominant role of electronic processes in the bipolar resistive switching in bilayer structures with platinum electrodes. The transition from the HRS to the LRS is associated with reaching the trap-filling limit (TFL) in the local conductive filamentary area at a high injection level.…”
Section: Resultsmentioning
confidence: 92%
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“…In these structures, a 5 nm thick Al 2 O 3 layer oxide plays a role of an active (or switching) layer, while 30-60 nm 02.thick titanium oxide layer acts as a reservoir of oxygen vacancies. Moreover, the similar devices demonstrate high switching speed, low power consumption, wide dynamic range, high resistance to cyclic degradation, high scalability, and compatibility with CMOS technologies [25][26][27][28].…”
Section: Introductionmentioning
confidence: 99%