Multilayer Graphene Strips on Insulators Formed by Layer Exchange for Applications as Interconnects
Hiromasa Murata,
Takamitsu Ishiyama,
Katsuhisa Murakami
et al.
Abstract:Multilayer graphene (MLG) has attracted considerable attention as an interconnect material owing to its excellent electrical and mechanical properties. Several studies on the formation of MLG on insulators have been reported; however, the process temperature and shape controllability of MLG remain challenging. In this study, we investigated the formation of MLG strips for interconnect via metal-induced layer exchange (LE). The LE of strip-patterned amorphous carbon and Ni formed {002}oriented high-crystallinit… Show more
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